Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge density
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2018 ◽
Vol 73
(2)
◽
pp. 99-108
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2014 ◽
Vol 70
(a1)
◽
pp. C969-C969
1990 ◽
Vol 100
◽
pp. 287-299
◽
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