scholarly journals Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films

2006 ◽  
Vol 55 (5) ◽  
pp. 2523
Author(s):  
Huang Rui ◽  
Lin Xuan-Ying ◽  
Yu Yun-Peng ◽  
Lin Kui-Xun ◽  
Zhu Zu-Song ◽  
...  
Keyword(s):  
Optical Properties ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Hydrogen Dilution ◽  
Polycrystalline Silicon Films

On the optical properties of SLS ELA polycrystalline silicon films

2012 ◽  
Vol 90 ◽  
pp. 69-71 ◽  
Author(s):  
Despina C. Moschou ◽  
Nikolaos Vourdas ◽  
Dimitrios Davazoglou ◽  
Dimitrios N. Kouvatsos ◽  
Vassilis Emm. Vamvakas ◽  
...  
Keyword(s):  
Optical Properties ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Hydrogen Dilution Effect on the Crystallinity of Silicon Films Grow by Hot Wire Cell Method

1999 ◽  
Vol 557 ◽  
Author(s):  
M. Ichikawa ◽  
J. Takeshita ◽  
A. Yamada ◽  
M. Konagai
Keyword(s):  
Thin Films ◽  
Growth Rate ◽  
Polycrystalline Silicon ◽  
High Growth ◽  
Silicon Films ◽  
Hot Wire ◽  
Cell Method ◽  
Silicon Thin Films ◽  
Hydrogen Dilution ◽  
Polycrystalline Silicon Films

AbstractA new process, the Hot Wire Cell method, was developed and successfully used to grow polycrystalline silicon thin films at a low temperature and high growth rate. In the Hot Wire Cell method, reactant gases are decomposed as a result of reacting with a heated tungsten filament placed near to a substrate and polycrystalline silicon films can be deposited at a growth rate of 1.2nm/s without hydrogen dilution and 0.9nm/s with the use hydrogen dilution. The film crystallinity changed from amorphous to polycrystalline due to the addition of hydrogen, thus hydrogen dilution was effective for improving film crystallinity. Furthermore, we obtained (220) oriented polycrystalline silicon thin films with a 90% crystal fraction by the use of hydrogen dilution. These results showed that the Hot Wire Cell method is promising for the deposition of device-grade polycrystalline silicon films for photovoltaic applications.

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