Preparation of carbon-based thin films by various vapor deposition method and their application to functional devices

TANSO ◽  
2010 ◽  
Vol 2010 (245) ◽  
pp. 211-221
Author(s):  
Yoshimi Ohzawa ◽  
Masayuki Kawaguchi ◽  
Tomokazu Fukutsuka
Keyword(s):  
Thin Films ◽  
Vapor Deposition ◽  
Deposition Method ◽  
Carbon Based

Preparation of carbon-based thin films by various vapor deposition method and their application to functional devices

Carbon ◽  
2011 ◽  
Vol 49 (4) ◽  
pp. 1509
Author(s):  
Yoshimi Ohzawa ◽  
Masayuki Kawaguchi ◽  
Tomokazu Fukutsuka
Keyword(s):  
Thin Films ◽  
Vapor Deposition ◽  
Deposition Method ◽  
Carbon Based

Fabrication of Organic Small Molecular Thin Films based on Ultrasonic Spray-Assisted Vapor-Deposition Method

2012 ◽  
Vol 1400 ◽  
Author(s):  
Jinchun Piao ◽  
Shigetaka Katori ◽  
Takumi Ikenoue ◽  
Shizuo Fujita
Keyword(s):  
Thin Films ◽  
Indium Tin Oxide ◽  
Vapor Deposition ◽  
Low Cost ◽  
Device Fabrication ◽  
Deposition Method ◽  
Material Loss ◽  
Good Surface ◽  
Low Leakage ◽  
Molecular Thin Films

ABSTRACTSmall molecular thin films using solution-based method is a challengeable subject in organic optical and electronic devices. In our previous research, we successfully deposited aluminum tris(8-hydroxyquinoline) (Alq3) films on glass substrate. In this paper, aiming at future exploration of electroluminescent devices, we deposited N, N ’-Bis(3-methylphenyl)-N,N’- diphenylbenzidine) (TPD) films on indium-tin-oxide (ITO) substrates using the vapor-deposition method. Photoluminescence characteristics evidenced the actual formation of TPD thin films. Together with the good surface morphology and low leakage current of the films, the results are promising for actual device fabrication at low cost and low material loss.

Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

2008 ◽  
Vol 516 (5) ◽  
pp. 687-690 ◽  
Author(s):  
Hiroaki Yasuoka ◽  
Masahiro Yoshida ◽  
Ken Sugita ◽  
Keisuke Ohdaira ◽  
Hideyuki Murata ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Catalytic Chemical Vapor Deposition
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