scholarly journals Silicon Oxide Films Containing Amorphous or Crystalline Silicon Nanodots for Device Applications

10.5772/35122 ◽  
2012 ◽  
Author(s):  
Diana Nesheva ◽  
Nikola Nedev ◽  
Mario Curiel ◽  
Irina Bineva ◽  
Benjamin Valdez ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Crystalline Silicon ◽  
Oxide Films ◽  
Device Applications

scholarly journals Poly-crystalline silicon-oxide films as carrier-selective passivating contacts for c-Si solar cells

2018 ◽  
Vol 112 (19) ◽  
pp. 193904 ◽  
Author(s):  
Guangtao Yang ◽  
Peiqing Guo ◽  
Paul Procel ◽  
Arthur Weeber ◽  
Olindo Isabella ◽  
...  
Keyword(s):  
Solar Cells ◽  
Silicon Oxide ◽  
Crystalline Silicon ◽  
Oxide Films ◽  
Si Solar Cells

scholarly journals Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1803
Author(s):  
Zhen Zheng ◽  
Junyang An ◽  
Ruiling Gong ◽  
Yuheng Zeng ◽  
Jichun Ye ◽  
...  
Keyword(s):  
Structural Changes ◽  
Silicon Oxide ◽  
Crystalline Silicon ◽  
Contact Potential Difference ◽  
Potential Difference ◽  
Kelvin Probe ◽  
Contact Potential ◽  
Carrier Lifetimes ◽  
Transmission Electron ◽  
Effective Carrier

In this work, we report the same trends for the contact potential difference measured by Kelvin probe force microscopy and the effective carrier lifetime on crystalline silicon (c-Si) wafers passivated by AlOx layers of different thicknesses and submitted to annealing under various conditions. The changes in contact potential difference values and in the effective carrier lifetimes of the wafers are discussed in view of structural changes of the c-Si/SiO2/AlOx interface thanks to high resolution transmission electron microscopy. Indeed, we observed the presence of a crystalline silicon oxide interfacial layer in as-deposited (200 °C) AlOx, and a phase transformation from crystalline to amorphous silicon oxide when they were annealed in vacuum at 300 °C.

The Composition and Properties of PECVD Silicon Oxide Films

1985 ◽  
Vol 132 (8) ◽  
pp. 2012-2019 ◽  
Author(s):  
P. Pan ◽  
L. A. Nesbit ◽  
R. W. Douse ◽  
R. T. Gleason
Keyword(s):  
Silicon Oxide ◽  
Oxide Films

The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

1970 ◽  
Vol 117 (2) ◽  
pp. 272 ◽  
Author(s):  
William A. FitzGibbons ◽  
Thomas Kloffenstein ◽  
Karl M. Busen
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermally Grown
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