scholarly journals Fabrication and Study on One-Transistor-Capacitor Structure of Nonvolatile Random Access Memory TFT Devices Using Ferroelectric Gated Oxide Film

10.5772/16405 ◽  
2011 ◽  
Author(s):  
Chien-Min Cheng ◽  
Kai-Huang Chen ◽  
Chun-Cheng Lin ◽  
Ying-Chung Chen ◽  
Chih-Sheng Chen ◽  
...  
Keyword(s):  
Oxide Film ◽  
Random Access ◽  
Random Access Memory ◽  
Access Memory ◽  
Capacitor Structure

Plasma Etching for Fabricating the Concave-Type DRAM Capacitors

2004 ◽  
Vol 449-452 ◽  
pp. 353-356
Author(s):  
Hyoun Woo Kim
Keyword(s):  
Plasma Etching ◽  
Barium Strontium Titanate ◽  
Bottom Electrode ◽  
Random Access ◽  
Random Access Memory ◽  
Metal Electrode ◽  
Access Memory ◽  
Barium Strontium ◽  
Fabrication Procedure ◽  
Capacitor Structure

The usage of barium strontium titanate (BST) capacitor have recently been considered in the fabrication of dynamic random access memory (DRAM) device. In this study, in order to avoid the difficulties of high aspect ratio etching of bottom electrode in the conventional stack-typecapacitor structure, we suggest to introduce a concave-type capacitor structure. The fabrication procedure of the two kinds of the concave capacitor cells, Pt/BST/Pt and Ru/BST/Ru are explained. We have studied on the metal electrode etching in the concave structure and have discussed the patterning issues in fabricating the capacitor structures.

The Novel Capacitor Structure with Polysilicon Grain Hole for Advanced Dynamic Random Access Memory

1994 ◽  
Vol 33 (Part 1, No. 1B) ◽  
pp. 578-580 ◽  
Author(s):  
Youngjoo Yee ◽  
Sanggi Yu ◽  
Kukjin Chun ◽  
Jong Duk Lee
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
The Novel ◽  
Access Memory ◽  
Capacitor Structure

Ferroelectric random access memory based on one-transistor–one-capacitor structure for flexible electronics

2013 ◽  
Vol 14 (2) ◽  
pp. 505-510 ◽  
Author(s):  
D. Mao ◽  
I. Mejia ◽  
A.L. Salas-Villasenor ◽  
M. Singh ◽  
H. Stiegler ◽  
...  
Keyword(s):  
Flexible Electronics ◽  
Random Access ◽  
Random Access Memory ◽  
Access Memory ◽  
Ferroelectric Random Access Memory ◽  
Capacitor Structure
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