scholarly journals Development of Ar Cluster-Ion Beam and Time-of-Flight Secondary-Ion Mass Spectrometer

2019 ◽  
Vol 28 (6) ◽  
pp. 8-12
Author(s):  
Myoung Choul CHOI
Keyword(s):  
Mass Spectrometer ◽  
Ion Beam ◽  
Time Of Flight ◽  
Cluster Ion ◽  
Secondary Ion

Time-of-flight secondary ion mass spectroscopy for surface analysis of insulators using a cluster ion beam

2003 ◽  
Vol 83 (23) ◽  
pp. 4872-4874 ◽  
Author(s):  
K. Hirata ◽  
Y. Saitoh ◽  
A. Chiba ◽  
K. Narumi ◽  
Y. Kobayashi ◽  
...  
Keyword(s):  
Surface Analysis ◽  
Mass Spectroscopy ◽  
Ion Beam ◽  
Time Of Flight ◽  
Secondary Ion Mass Spectroscopy ◽  
Cluster Ion ◽  
Secondary Ion

scholarly journals Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry

2022 ◽  
Vol 572 ◽  
pp. 151467
Author(s):  
Sang Ju Lee ◽  
Aram Hong ◽  
Jinwan Cho ◽  
Chang Min Choi ◽  
Ji Young Baek ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Time Of Flight ◽  
Mixed Gas ◽  
Ion Mass Spectrometry ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Secondary Ion
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