Surface shape control of electrostatic stretching membrane mirror by multi-electrodes

2012 ◽  
Vol 20 (2) ◽  
pp. 344-351 ◽  
Author(s):  
张鹏 ZHANG Peng ◽  
金光 JIN Guang ◽  
张元 ZHANG Yuan ◽  
钟兴 ZHONG Xing
Keyword(s):  
Shape Control ◽  
Surface Shape

Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder

2011 ◽  
Vol 32 (10) ◽  
pp. 104010 ◽  
Author(s):  
Xianglong Zhu ◽  
Renke Kang ◽  
Zhigang Dong ◽  
Guang Feng
Keyword(s):  
Shape Control ◽  
Surface Shape

Development of Ultra-Precision Grinder for 300mm Wafers

2012 ◽  
Vol 565 ◽  
pp. 609-614 ◽  
Author(s):  
X.L. Zhu ◽  
Z.G. Dong ◽  
Ren Ke Kang ◽  
D.M. Guo
Keyword(s):  
Shape Control ◽  
State Of The Art ◽  
Surface Shape ◽  
Wafer Surface ◽  
Thickness Variation ◽  
Grinding Forces ◽  
Wafer Thickness ◽  
Ultra Precision ◽  
Total Thickness Variation ◽  
And Control

This study presents design of an ultra-precision wafer grinder which incorporates state-of-the-art automatic supervision and control system. The wafer grinder is characterized by wafer surface shape control, grinding forces and wafer thickness monitoring systems. The design provides a totally integrated solution to the ultra-precision grinder that is capable of grinding silicon wafers with surface roughness Ra<3 nm and total thickness variation<2µm/300mm.

Surface Precision of Inflatable Membrane Reflectors

1998 ◽  
Vol 120 (4) ◽  
pp. 298-305 ◽  
Author(s):  
C. H. Jenkins ◽  
D. K. Marker
Keyword(s):  
Air Force ◽  
Shape Control ◽  
Circular Disk ◽  
Surface Shape ◽  
Shape Modification ◽  
Element Analysis ◽  
Parabolic Profile ◽  
Surface Precision ◽  
Diverse Groups ◽  
Optical Telescopes

Space-based inflatable technology is of current interest to NASA and DOD, and in particular to the Air Force and Phillips Laboratory. Potentially large gains in lowering launch costs, through reductions in structure mass and volume, are driving this activity. Diverse groups are researching and developing this technology for radio and radar antennae, optical telescopes, and solar power and propulsion applications. Regardless of the use, one common requirement for successful application is the accuracy of the inflated surface shape. The work reported here concerns the shape control of an inflated thin circular disk through use of a nonlinear finite element analysis. First, a review of the important associated Hencky problem is given. Then we discuss a shape modification, achieved through enforced boundary displacements, which resulted in moving the inflated shape towards a desired parabolic profile. Minimization of the figure error is discussed and conclusions are drawn.

Comparison of Surface Shape Control Algorithms for Deformable Mirror

2013 ◽  
Author(s):  
Tenghao Li ◽  
Lei Huang ◽  
Zexin Feng ◽  
Yuntao Qiu ◽  
Qiao Xue ◽  
...  
Keyword(s):  
Shape Control ◽  
Surface Shape ◽  
Deformable Mirror ◽  
Control Algorithms

A system for the analysis of seat support surfaces using surface shape control and simultaneous measurement of applied pressures

1996 ◽  
Vol 4 (2) ◽  
pp. 103-113 ◽  
Author(s):  
D.M. Brienza ◽  
K.C. Chung ◽  
C.E. Brubaker ◽  
J. Wang ◽  
T.E. Kang ◽  
...  
Keyword(s):  
Simultaneous Measurement ◽  
Shape Control ◽  
Surface Shape ◽  
Support Surfaces
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