Comparison of Surface Shape Control Algorithms for Deformable Mirror

2013 ◽  
Author(s):  
Tenghao Li ◽  
Lei Huang ◽  
Zexin Feng ◽  
Yuntao Qiu ◽  
Qiao Xue ◽  
...  
Keyword(s):  
Shape Control ◽  
Surface Shape ◽  
Deformable Mirror ◽  
Control Algorithms

Surface shape control of electrostatic stretching membrane mirror by multi-electrodes

2012 ◽  
Vol 20 (2) ◽  
pp. 344-351 ◽  
Author(s):  
张鹏 ZHANG Peng ◽  
金光 JIN Guang ◽  
张元 ZHANG Yuan ◽  
钟兴 ZHONG Xing
Keyword(s):  
Shape Control ◽  
Surface Shape

Research on the particular temperature-induced surface shape of a National Ignition Facility deformable mirror

2013 ◽  
Vol 52 (2) ◽  
pp. 280 ◽  
Author(s):  
Qiao Xue ◽  
Lei Huang ◽  
Ping Yan ◽  
Mali Gong ◽  
Zexin Feng ◽  
...  
Keyword(s):  
Surface Shape ◽  
Deformable Mirror ◽  
National Ignition Facility

Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder

2011 ◽  
Vol 32 (10) ◽  
pp. 104010 ◽  
Author(s):  
Xianglong Zhu ◽  
Renke Kang ◽  
Zhigang Dong ◽  
Guang Feng
Keyword(s):  
Shape Control ◽  
Surface Shape

Development of Ultra-Precision Grinder for 300mm Wafers

2012 ◽  
Vol 565 ◽  
pp. 609-614 ◽  
Author(s):  
X.L. Zhu ◽  
Z.G. Dong ◽  
Ren Ke Kang ◽  
D.M. Guo
Keyword(s):  
Shape Control ◽  
State Of The Art ◽  
Surface Shape ◽  
Wafer Surface ◽  
Thickness Variation ◽  
Grinding Forces ◽  
Wafer Thickness ◽  
Ultra Precision ◽  
Total Thickness Variation ◽  
And Control

This study presents design of an ultra-precision wafer grinder which incorporates state-of-the-art automatic supervision and control system. The wafer grinder is characterized by wafer surface shape control, grinding forces and wafer thickness monitoring systems. The design provides a totally integrated solution to the ultra-precision grinder that is capable of grinding silicon wafers with surface roughness Ra<3 nm and total thickness variation<2µm/300mm.

Open-loop shape control for continuous microelectromechanical system deformable mirror

2010 ◽  
Vol 49 (31) ◽  
pp. G148 ◽  
Author(s):  
Alioune Diouf ◽  
Andrew P. Legendre ◽  
Jason B. Stewart ◽  
Thomas G. Bifano ◽  
Yang Lu
Keyword(s):  
Shape Control ◽  
Open Loop ◽  
Deformable Mirror ◽  
Microelectromechanical System ◽  
Loop Shape

scholarly journals Wide aperture piezoceramic deformable mirrors for aberration correction in high-power lasers

2016 ◽  
Vol 4 ◽  
Author(s):  
Vadim Samarkin ◽  
Alexander Alexandrov ◽  
Gilles Borsoni ◽  
Takahisa Jitsuno ◽  
Pavel Romanov ◽  
...  
Keyword(s):  
High Power ◽  
Surface Shape ◽  
Wavefront Sensor ◽  
Deformable Mirror ◽  
Deformable Mirrors ◽  
Aberration Correction ◽  
Response Functions ◽  
Fizeau Interferometer ◽  
High Power Lasers ◽  
Wide Aperture

The deformable mirror with the size of $410~\text{mm}\times 468~\text{mm}$ controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack–Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of $0.033~{\rm\mu}\text{m}$ (RMS). The possibility of correction of the aberrations in high-power lasers was numerically demonstrated.

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