Micro-fabrication process of vapor cells for chip-scale atomic clocks

2019 ◽  
Vol 17 (4) ◽  
pp. 040202
Author(s):  
Yanjun Zhang Yanjun Zhang ◽  
Yunchao Li Yunchao Li ◽  
Xuwen Hu Xuwen Hu ◽  
Lu Zhang Lu Zhang ◽  
Zhaojun Liu Zhaojun Liu ◽  
...  
Keyword(s):  
Fabrication Process ◽  
Atomic Clocks ◽  
Micro Fabrication ◽  
Vapor Cells

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

2019 ◽  
Vol 17 (10) ◽  
pp. 100201
Author(s):  
Lu Zhang ◽  
Wendong Zhang ◽  
Shougang Zhang ◽  
Shubin Yan
Keyword(s):  
Alkali Atom ◽  
Anodic Bonding ◽  
Micro Fabrication ◽  
Vapor Cells

Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

2019 ◽  
Author(s):  
Christophe Gorecki ◽  
Nicolas Passilly ◽  
Vincent Maurice ◽  
Sylwester Bargiel ◽  
Ravinder Chutani ◽  
...  
Keyword(s):  
Atomic Clocks ◽  
Vapor Cells

scholarly journals Micro-fabrication process for small transport devices of layered manganite

2012 ◽  
Vol 111 (7) ◽  
pp. 07E129 ◽  
Author(s):  
A. A. Omrani ◽  
G. Deng ◽  
A. Radenovic ◽  
A. Kis ◽  
H. M. Rønnow
Keyword(s):  
Fabrication Process ◽  
Micro Fabrication

Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks

2011 ◽  
Vol 167 (2) ◽  
pp. 594-601 ◽  
Author(s):  
M. Hasegawa ◽  
R.K. Chutani ◽  
C. Gorecki ◽  
R. Boudot ◽  
P. Dziuban ◽  
...  
Keyword(s):  
Atomic Clocks ◽  
Buffer Gas ◽  
Cesium Vapor ◽  
Vapor Cells

Nano-Grating Fabrication Technique

2006 ◽  
Vol 326-328 ◽  
pp. 131-134 ◽  
Author(s):  
Hui Min Xie ◽  
Zhan Wei Liu ◽  
Ming Zhang ◽  
Peng Wan Chen ◽  
Feng Lei Huang ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Spatial Resolution ◽  
Deformation Measurement ◽  
Fabrication Process ◽  
Fabrication Technique ◽  
Micro Fabrication ◽  
Grating Fabrication ◽  
Atomic Force ◽  
Experimental Parameters ◽  
Moire Method

In this paper, a novel nano-moiré grating fabrication technique was proposed for nanometer deformation measurement. The grating fabrication process was performed with the aid of Atomic Force Microscope (AFM) on the basis of micro-fabrication technique. On the analysis of some correlative factors of influencing grating line quality, some important experimental parameters were optimized. In this study, some parallel and cross nano-gratings with frequencies of from 10000lines/mm to 20000lines/mm were fabricated. The successful experimental results demonstrate that the nano-grating fabrication technique is feasible and also indicated that these nano-gratings with nano-moiré method can be applied to deformation measurement, which offers a nanometer sensitivity and spatial resolution.

Computational Simulation on Thermal Aspect of Micro-Fabrication Process for MEMS Device

2005 ◽  
Author(s):  
Raymond K. Yee ◽  
Gabriel C. Chan
Keyword(s):  
Residual Stresses ◽  
Silicon Dioxide ◽  
Computational Simulation ◽  
Fabrication Process ◽  
Computational Method ◽  
Mems Devices ◽  
Micro Fabrication ◽  
Polysilicon Film ◽  
Mems Device ◽  
Micro Cantilever

The inherent residual stresses and strains from micro fabrication process can have profound effects on the functionality and reliability of MEMS devices. Surface micromachining fabrication involves a series of sequential steps of addition and subtraction of materials through deposition and etching techniques. For instance, when a typical micro cantilever beam is fabricated, layers of silicon dioxide and polysilicon structures are deposited on top of silicon substrate. Part of the silicon dioxide layer is chemically etched out before the deposition of polysilicon layer. Due to mismatch of coefficients of thermal expansion (CTE) in layered structure, thermal cycle loading during micromachining fabrication can induce significant residual stress within a part from thermal aspect alone. Computational method is used to simulate the micromachining fabrication process for MEMS and to predict the residual stresses/strains in a selected MEMS device. The focus of the study is on the thermal aspect of deposition and etching processes during micromachining. Particular attention is placed on the effects of deposition temperature and polysilicon film thickness on resulting residual stresses.

scholarly journals Double-resonance in alkali vapor cells for high performance and miniature atomic clocks

2012 ◽  
Author(s):  
Thejesh Bandi ◽  
Matthieu Pellaton ◽  
Danijela Miletic ◽  
Christoph Affolderbach ◽  
Florian Gruet ◽  
...  
Keyword(s):  
High Performance ◽  
Double Resonance ◽  
Atomic Clocks ◽  
Vapor Cells
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