Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

2016 ◽  
Vol 14 (2) ◽  
pp. 021407-21410 ◽  
Author(s):  
Bo Gao Bo Gao ◽  
Tao Chen Tao Chen ◽  
Vanthanh Khuat Vanthanh Khuat ◽  
Jinhai Si Jinhai Si ◽  
and Xun Hou and Xun Hou
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

scholarly journals Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane

2020 ◽  
Vol 2 (5) ◽  
pp. 1886-1893
Author(s):  
Shuichiro Hayashi ◽  
Fumiya Morosawa ◽  
Mitsuhiro Terakawa
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Graphitic Carbon ◽  
Femtosecond Laser Irradiation ◽  
Nano Scale

Micro- and nano-scale investigation of the modified regions of native polydimethylsiloxane (PDMS) by femtosecond-laser irradiation revealed the formation of silicon carbide nanocrystals and multilayer graphitic carbon.

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

2020 ◽  
Vol 57 (11) ◽  
pp. 111419
Author(s):  
沈天伦 Shen Tianlun ◽  
司金海 Si Jinhai ◽  
陈涛 Chen Tao ◽  
侯洵 Hou Xun
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

2014 ◽  
Vol 289 ◽  
pp. 529-532 ◽  
Author(s):  
Vanthanh Khuat ◽  
Yuncan Ma ◽  
Jinhai Si ◽  
Tao Chen ◽  
Feng Chen ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Femtosecond Laser Irradiation ◽  
Acid Etching

Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching

2014 ◽  
Vol 104 (24) ◽  
pp. 241907 ◽  
Author(s):  
Vanthanh Khuat ◽  
Tao Chen ◽  
Bo Gao ◽  
Jinhai Si ◽  
Yuncan Ma ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Femtosecond Laser Irradiation ◽  
Acid Etching ◽  
Micro Hole

Nanostructuring of single-crystal silicon carbide by femtosecond laser irradiation in a liquid

2014 ◽  
Vol 22 (1) ◽  
pp. 15-18 ◽  
Author(s):  
E. V. Barmina ◽  
A. A. Serkov ◽  
G. A. Shafeev ◽  
E. Stratakis ◽  
C. Fotakis
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Single Crystal ◽  
Laser Irradiation ◽  
Single Crystal Silicon ◽  
Femtosecond Laser Irradiation ◽  
Crystal Silicon

Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

2014 ◽  
Vol 31 (3) ◽  
pp. 037901 ◽  
Author(s):  
Khuat Vanthanh ◽  
Yun-Can Ma ◽  
Jin-Hai Si ◽  
Tao Chen ◽  
Feng Chen ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Femtosecond Laser Irradiation ◽  
Acid Etching

Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching

2015 ◽  
Vol 42 (1) ◽  
pp. 0103007
Author(s):  
李艳娜 Li Yanna ◽  
陈涛 Chen Tao ◽  
潘安 Pan An ◽  
司金海 Si Jinhai ◽  
侯洵 Hou Xun
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
High Aspect Ratio ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation
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