Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

2015 ◽  
Vol 325 ◽  
pp. 145-150 ◽  
Author(s):  
Tao Chen ◽  
An Pan ◽  
Cunxia Li ◽  
Jinhai Si ◽  
Xun Hou
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
High Aspect Ratio ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching

2015 ◽  
Vol 42 (1) ◽  
pp. 0103007
Author(s):  
李艳娜 Li Yanna ◽  
陈涛 Chen Tao ◽  
潘安 Pan An ◽  
司金海 Si Jinhai ◽  
侯洵 Hou Xun
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
High Aspect Ratio ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

scholarly journals Fabrication of high-aspect-ratio grooves in silicon using femtosecond laser irradiation and oxygen-dependent acid etching

2013 ◽  
Vol 21 (14) ◽  
pp. 16657 ◽  
Author(s):  
An Pan ◽  
Jinhai Si ◽  
Tao Chen ◽  
Yuncan Ma ◽  
Feng Chen ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
High Aspect Ratio ◽  
Femtosecond Laser Irradiation ◽  
Acid Etching

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

2020 ◽  
Vol 57 (11) ◽  
pp. 111419
Author(s):  
沈天伦 Shen Tianlun ◽  
司金海 Si Jinhai ◽  
陈涛 Chen Tao ◽  
侯洵 Hou Xun
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

2016 ◽  
Vol 14 (2) ◽  
pp. 021407-21410 ◽  
Author(s):  
Bo Gao Bo Gao ◽  
Tao Chen Tao Chen ◽  
Vanthanh Khuat Vanthanh Khuat ◽  
Jinhai Si Jinhai Si ◽  
and Xun Hou and Xun Hou
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

Generation of nano-bumps on transparent quartz glass surface under femtosecond laser irradiation

2008 ◽  
Author(s):  
Wei Guo ◽  
Zeng Bo Wang ◽  
Lin Li ◽  
Zhu Liu ◽  
Boris Luk’yanchuk ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Quartz Glass ◽  
Glass Surface ◽  
Femtosecond Laser Irradiation

Non-diffraction-length Bessel-beam femtosecond laser drilling of high-aspect-ratio microholes in PMMA

Optik ◽  
2021 ◽  
Vol 229 ◽  
pp. 166295
Author(s):  
Haoran Wang ◽  
Fan Zhang ◽  
Kaiwen Ding ◽  
Ji'an Duan
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Bessel Beam ◽  
Laser Drilling

scholarly journals Condensation of Si-rich region inside soda-lime glass by parallel femtosecond laser irradiation

2014 ◽  
Vol 22 (13) ◽  
pp. 16493 ◽  
Author(s):  
Masaaki Sakakura ◽  
Kouhei Yoshimura ◽  
Torataro Kurita ◽  
Masahiro Shimizu ◽  
Yasuhiko Shimotsuma ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Soda Lime ◽  
Femtosecond Laser Irradiation ◽  
Soda Lime Glass ◽  
Rich Region

scholarly journals Three- and four-photon excited upconversion luminescence in terbium doped lutetium silicate powders by femtosecond laser irradiation

2013 ◽  
Vol 3 (11) ◽  
pp. 1803 ◽  
Author(s):  
Nikifor Rakov ◽  
Whualkuer Lozano B. ◽  
Edilson L. Falcão-filho ◽  
Renato B. Guimarães ◽  
Glauco S. Maciel ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Upconversion Luminescence ◽  
Femtosecond Laser Irradiation
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