Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane
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Micro- and nano-scale investigation of the modified regions of native polydimethylsiloxane (PDMS) by femtosecond-laser irradiation revealed the formation of silicon carbide nanocrystals and multilayer graphitic carbon.
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
2014 ◽
Vol 289
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pp. 529-532
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2014 ◽
Vol 22
(1)
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pp. 15-18
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Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching
2014 ◽
Vol 31
(3)
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pp. 037901
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2016 ◽
Vol 14
(2)
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pp. 021407-21410
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