Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching
Keyword(s):
Keyword(s):
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
2014 ◽
Vol 289
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pp. 529-532
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Keyword(s):
Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching
2014 ◽
Vol 31
(3)
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pp. 037901
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Keyword(s):
Keyword(s):
Keyword(s):
2014 ◽
Vol 22
(1)
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pp. 15-18
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Keyword(s):
2016 ◽
Vol 14
(5)
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pp. 052201-52205
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Keyword(s):
2015 ◽
Vol 32
(10)
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pp. 107901
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