scholarly journals Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography

Optics ◽  
2021 ◽  
Vol 2 (2) ◽  
pp. 103-112
Author(s):  
Zhuohui Xu ◽  
Jinyun Zhou ◽  
Bo Wang ◽  
Ziming Meng
Keyword(s):  
Optical Element ◽  
Maskless Lithography ◽  
Modulation Transfer ◽  
Lens System ◽  
Aspheric Surfaces ◽  
Imaging Quality ◽  
Projection Lens ◽  
Field Curvature ◽  
Exposure Pattern ◽  
Working Distance

The projection lens is the core component of DMD-based maskless lithography and its imaging quality directly affects the transferal of exposure pattern. Based on the traditional projection lens system, we have designed diffractive optical element (DOE) and aspheric surfaces to optimize the refractive/diffractive hybrid projection lens system to improve its imaging quality. We found that the best effect is obtained when DOE is very close to the front lens group before the diaphragm of the hybrid system. Compared with the traditional projection lens system, this hybrid projection lens system has lower wave aberration with the help of DOE, and higher image quality owing to the modulation transfer function (MTF) value being improved. Finally, a hybrid projection lens system with working distance of 29.07 mm, image Space NA of 0.45, and total length of 196.97 mm is designed. We found that the maximum distortion and field curvature are 1.36 × 10−5% and 0.91 μm, respectively.

RETRACTED: Adaptive neuro-fuzzy prediction of modulation transfer function of optical lens system

2014 ◽  
Vol 65 ◽  
pp. 54-60 ◽  
Author(s):  
Dalibor Petković ◽  
Shahaboddin Shamshirband ◽  
Nor Badrul Anuar ◽  
Mohd Hairul Nizam Md Nasir ◽  
Nenad T. Pavlović ◽  
...  
Keyword(s):  
Transfer Function ◽  
Modulation Transfer Function ◽  
Modulation Transfer ◽  
Lens System ◽  
Optical Lens ◽  
Neuro Fuzzy

New projection lens system for KrF exposure scanning tool

2001 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Junichi Misawa ◽  
Yuichi Shibazaki
Keyword(s):  
Lens System ◽  
Projection Lens

A simple optical system delivering a tunable micrometer pink beam that can compensate for heat-induced deformations

2015 ◽  
Vol 22 (4) ◽  
pp. 930-935 ◽  
Author(s):  
Ruben Reininger ◽  
Zunping Liu ◽  
Gilles Doumy ◽  
Linda Young
Keyword(s):  
Optical System ◽  
Heat Load ◽  
Optical Element ◽  
High Energy ◽  
Angle Of Incidence ◽  
Optical Elements ◽  
Source Distance ◽  
Energy Cutoff ◽  
Working Distance ◽  
Photon Source

The radiation from an undulator reflected from one or more optical elements (usually termed `pink-beam') is used in photon-hungry experiments. The optical elements serve as a high-energy cutoff and for focusing purposes. One of the issues with this configuration is maintaining the focal spot dimension as the energy of the undulator is varied, since this changes the heat load absorbed by the first optical element. Finite-element analyses of the power absorbed by a side water-cooled mirror exposed to the radiation emitted by an undulator at the Advanced Photon Source (APS) and at the APS after the proposed upgrade (APSU) reveals that the mirror deformation is very close to a convex cylinder creating a virtual source closer to the mirror than the undulator source. Here a simple optical system is described based on a Kirkpatrick–Baez pair which keeps the focus size to less than 2 µm (in the APSU case) with a working distance of 350 mm despite the heat-load-induced change in source distance. Detailed ray tracings at several photon energies for both the APS and APSU show that slightly decreasing the angle of incidence on the mirrors corrects the change in the `virtual' position of the source. The system delivers more than 70% of the first undulator harmonic with very low higher-orders contamination for energies between 5 and 10 keV.

Modulation Transfer Function Measurement System at Different Contrasts for CCD Camera

2012 ◽  
Vol 241-244 ◽  
pp. 648-652
Author(s):  
Wen Juan Li ◽  
Chuan Liang ◽  
Ning Zhi Jin ◽  
Mei Lan Zhou
Keyword(s):  
Measurement System ◽  
Ccd Camera ◽  
Imaging Systems ◽  
Integrating Sphere ◽  
Test Target ◽  
Modulation Transfer ◽  
Imaging Quality ◽  
The Face ◽  
The Many

In order to achieve MTFs at different contrasts, the MTF measurement system is designed and developed. Two integrating spheres are used to illuminate the face and back of the test target uniformly. The target luminance and background luminance of the test target are regulated by adjusting the attenuators near the entrance of each integrating sphere. The many groups’ experimental results indicate that the luminance differences between the values by the system and those by L88 first level luminance meter, which is checked by National Institute of Metrology P. R. China, are within ±0.3 cd/m2. Thereby the measurement precision can be ensured in MTF test. MTFs of Sony camera and Cannon camera at different contrasts are measured by this system. The measurement values show that MTFs at different contrasts can demonstrate the imaging quality fully and objectively. This study provides an effective method to evaluate the imaging quality of visible imaging systems.

scholarly journals Evaluation of Geometrical Modulation Transfer Function in Optical Lens System

2015 ◽  
Vol 2015 ◽  
pp. 1-9 ◽  
Author(s):  
Cheng-Mu Tsai
Keyword(s):  
Transfer Function ◽  
Ray Tracing ◽  
Modulation Transfer Function ◽  
Focal Length ◽  
Image Plane ◽  
Modulation Transfer ◽  
Lens System ◽  
Entrance Pupil ◽  
Optical Lens ◽  
Spread Function

This paper presents ray tracing algorithms to evaluate the geometrical modulation transfer function (GMTF) of optical lens system. There are two kinds of ray tracings methods that can be applied to help simulate the point spread function (PSF) in the image plane, for example, paraxial optics and real ray tracings. The paraxial optics ray tracing is used to calculate the first-order properties such as the effective focal length (EFL) and the entrance pupil position through less cost of computation. However, the PSF could have a large tolerance by only using paraxial optics ray tracing for simulation. Some formulas for real ray tracing are applied in the sagittal and tangential line spread function (LSF). The algorithms are developed to demonstrate the simulation of LSF. Finally, the GMTF is evaluated after the fast Fourier transform (FFT) of the LSF.

scholarly journals A study of distortion correction algorithms based on aspheric fisheye lens design

2020 ◽  
Vol 50 (4) ◽  
Author(s):  
Dan Li ◽  
Baolong Zhang ◽  
Jiawei Zhu ◽  
Qi Wang ◽  
Zhenwei Zhu
Keyword(s):  
Design Method ◽  
Focal Length ◽  
Distortion Correction ◽  
Maximum Diameter ◽  
Image Point ◽  
Modulation Transfer ◽  
Fisheye Lens ◽  
Corrected Image ◽  
Glass Lens ◽  
Working Distance

A design method of aspheric fisheye lens has been proposed in this paper, based on the requirements of automobile surround view system. The study has designed a kind of ultra-wide-angle fisheye lens, which only consists of a spherical glass lens and three aspherical plastic lenses. The maximum diameter of imaging aperture is 15.3 mm; the working distance behind is 2.158 mm; the total length of system is 11.44 mm; the focal length is 0.97 mm; the viewing angle is 210°, and the modulation transfer function (MTF) curve is 0.35 at 60 lp/mm. Furthermore, a kind of a distortion correction algorithm for fisheye lens has been created, which calculates the position of the ideal image point with the actual image point and the obtained distortion curve and distortion model. The algorithm can correct the distorted image taken by a fisheye lens to an image without distortion, which is suitable for the human eye. The algorithm, which is simple and effective, has been applied to the automobile surround view system. It has been verified to be accurate and reasonable, after the comparison is made between the real image taken by a fisheye lens and the corrected image.

Modulation Transfer Function Estimation of Optical Lens System by Adaptive Neuro-Fuzzy Methodology

2014 ◽  
Vol 117 (1) ◽  
pp. 126-136 ◽  
Author(s):  
Dalibor Petkovi@ ◽  
Shahaboddin Shamshirband ◽  
Nenad T. Pavlovi@ ◽  
Nor Badrul Anuar ◽  
Miss Laiha Mat Kiah
Keyword(s):  
Transfer Function ◽  
Modulation Transfer Function ◽  
Function Estimation ◽  
Modulation Transfer ◽  
Lens System ◽  
Optical Lens ◽  
Neuro Fuzzy

An On-Line Digital Optical Bench Tester Based on Conoscopy for Lens Quality Evaluation

2013 ◽  
Author(s):  
Wei Hsuan Hsu ◽  
Paul C.-P. Chao ◽  
Wei Dar Chen ◽  
Che-Hung Tsai
Keyword(s):  
Focal Length ◽  
Index Of Refraction ◽  
Modulation Transfer ◽  
Field Curvature ◽  
A Cell ◽  
On Line ◽  
Quick Estimate ◽  
Liquid Crystal Lens ◽  
Back Focal Length

This study aims to develop an on-line tester machine for evaluating the image quality of a camera lens that is used in a lens module in a cell phone. This tester is not only suitable for conventional solid lens, but also applicable to the developing tunable liquid crystal lens by using the conoscopy approach to measure focus length and its quality. On the other hand, the approach using a commercial inspection chart along with a automatic feeding machine is also adopted for a quick estimate on the focusing quality that is primarily based on Modulation Transfer Function (MTF). In addition to the MTF, the proposed tester aims to has other functions of measuring Effect Focal Length (EFL), Back Focal Length (BFL), Field of View (FOV), Field curvature, Distortion, Astigmatism, Lateral/Axial Color, the distribution of index of refraction and phase retardation pattern. The constructed tester is capable of measuring varied optical performance indices for the next-generation tunable lens.

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