Effect of fabrication errors on binary optical element imaging quality

2013 ◽  
Author(s):  
Song Wang ◽  
Wei Yang ◽  
Shi-bin Wu
Keyword(s):  
Optical Element ◽  
Imaging Quality ◽  
Fabrication Errors

scholarly journals Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography

Optics ◽  
2021 ◽  
Vol 2 (2) ◽  
pp. 103-112
Author(s):  
Zhuohui Xu ◽  
Jinyun Zhou ◽  
Bo Wang ◽  
Ziming Meng
Keyword(s):  
Optical Element ◽  
Maskless Lithography ◽  
Modulation Transfer ◽  
Lens System ◽  
Aspheric Surfaces ◽  
Imaging Quality ◽  
Projection Lens ◽  
Field Curvature ◽  
Exposure Pattern ◽  
Working Distance

The projection lens is the core component of DMD-based maskless lithography and its imaging quality directly affects the transferal of exposure pattern. Based on the traditional projection lens system, we have designed diffractive optical element (DOE) and aspheric surfaces to optimize the refractive/diffractive hybrid projection lens system to improve its imaging quality. We found that the best effect is obtained when DOE is very close to the front lens group before the diaphragm of the hybrid system. Compared with the traditional projection lens system, this hybrid projection lens system has lower wave aberration with the help of DOE, and higher image quality owing to the modulation transfer function (MTF) value being improved. Finally, a hybrid projection lens system with working distance of 29.07 mm, image Space NA of 0.45, and total length of 196.97 mm is designed. We found that the maximum distortion and field curvature are 1.36 × 10−5% and 0.91 μm, respectively.

Antireflection Coatings for Semiconductor Failure Analysis

2000 ◽  
Author(s):  
Brennan Davis ◽  
Wilson Chi
Keyword(s):  
Failure Analysis ◽  
Material Properties ◽  
Antireflection Coating ◽  
Antireflection Coatings ◽  
Imaging Quality ◽  
Quality Material

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.

scholarly journals Nanooptical elements for visual verification

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Alexander Goncharsky ◽  
Anton Goncharsky ◽  
Dmitry Melnik ◽  
Svyatoslav Durlevich
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Mass Production ◽  
Optical Element ◽  
Visual Image ◽  
Zero Order ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Standard Equipment ◽  
Diffractive Element

AbstractThis paper focuses on the development of flat diffractive optical elements (DOEs) for protecting banknotes, documents, plastic cards, and securities against counterfeiting. A DOE is a flat diffractive element whose microrelief, when illuminated by white light, forms a visual image consisting of several symbols (digits or letters), which move across the optical element when tilted. The images formed by these elements are asymmetric with respect to the zero order. To form these images, the microrelief of a DOE must itself be asymmetric. The microrelief has a depth of ~ 0.3 microns and is shaped with an accuracy of ~ 10–15 nm using electron-beam lithography. The DOEs developed in this work are securely protected against counterfeiting and can be replicated hundreds of millions of times using standard equipment meant for the mass production of relief holograms.

scholarly journals Enhancing the Optical Efficiency of Near-Eye Displays with Liquid Crystal Optics

Crystals ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 107
Author(s):  
Tao Zhan ◽  
En-Lin Hsiang ◽  
Kun Li ◽  
Shin-Tson Wu
Keyword(s):  
Virtual Reality ◽  
Liquid Crystal ◽  
High Efficiency ◽  
Berry Phase ◽  
Optical Element ◽  
Liquid Crystal Polymer ◽  
Proof Of Concept ◽  
Optical Efficiency ◽  
Crystal Polymer ◽  
Light Efficiency

We demonstrate a light efficient virtual reality (VR) near-eye display (NED) design based on a directional display panel and a diffractive deflection film (DDF). The DDF was essentially a high-efficiency Pancharatnam-Berry phase optical element made of liquid crystal polymer. The essence of this design is directing most of the display light into the eyebox. The proposed method is applicable for both catadioptric and dioptric VR lenses. A proof-of-concept experiment was conducted with off-the-shelf optical parts, where the light efficiency was enhanced by more than 2 times.

scholarly journals Holographic Display System to Suppress Speckle Noise Based on Beam Shaping

Photonics ◽  
2021 ◽  
Vol 8 (6) ◽  
pp. 204
Author(s):  
Di Wang ◽  
Yi-Wei Zheng ◽  
Nan-Nan Li ◽  
Qiong-Hua Wang
Keyword(s):  
Optical Element ◽  
Speckle Noise ◽  
Beam Shaping ◽  
Diffractive Optical Element ◽  
The Other ◽  
Spatial Light Modulators ◽  
Viewing Angle ◽  
Display System ◽  
Holographic Display ◽  
Light Modulators

In this paper, a holographic system to suppress the speckle noise is proposed. Two spatial light modulators (SLMs) are used in the system, one of which is used for beam shaping, and the other is used for reproducing the image. By calculating the effective viewing angle of the reconstructed image, the effective hologram and the effective region of the SLM are calculated accordingly. Then, the size of the diffractive optical element (DOE) is calculated accordingly. The dynamic DOEs and effective hologram are loaded on the effective regions of the two SLMs, respectively, while the wasted areas of the two SLMs are performed with zero-padded operations. When the laser passes through the first SLM, the light can be modulated by the effective DOEs. When the modulated beam illuminates the second SLM which is loaded with the effective hologram, the image is reconstructed with better quality and lower speckle noise. Moreover, the calculation time of the hologram is reduced. Experiments indicate the validity of the proposed system.

scholarly journals Micro Non-Uniform Linear Array (MNULA) for Ultrasound Plane Wave Imaging

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 640
Author(s):  
Yujia Tang ◽  
Zhangjian Li ◽  
Yaoyao Cui ◽  
Chen Yang ◽  
Jiabing Lv ◽  
...  
Keyword(s):  
Plane Wave ◽  
Linear Array ◽  
Near Field ◽  
Uniform Linear Array ◽  
Imaging Technology ◽  
Linear Arrays ◽  
Imaging Quality ◽  
Imaging Results ◽  
Wave Imaging ◽  
Laboratory Technology

Ultrasound plane wave imaging technology has been applied to more clinical situations than ever before because of its rapid imaging speed and stable imaging quality. Most transducers used in plane wave imaging are linear arrays, but their structures limit the application of plane wave imaging technology in some special clinical situations, especially in the endoscopic environment. In the endoscopic environment, the size of the linear array transducer is strictly miniaturized, and the imaging range is also limited to the near field. Meanwhile, the near field of a micro linear array has serious mutual interferences between elements, which is against the imaging quality of near field. Therefore, we propose a new structure of a micro ultrasound linear array for plane wave imaging. In this paper, a theoretical comparison is given through sound field and imaging simulations. On the basis of primary work and laboratory technology, micro uniform and non-uniform linear arrays were made and experimented with the phantom setting. We selected appropriate evaluation parameters to verify the imaging results. Finally, we concluded that the micro non-uniform linear array eliminated the artifacts better than the micro uniform linear array without the additional use of signal processing methods, especially for target points in the near-field. We believe this study provides a possible solution for plane wave imaging in cramped environments like endoscopy.

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