scholarly journals Fabry-Perot Pressure Sensors Based on Polycrystalline Diamond Membranes

Materials ◽  
2021 ◽  
Vol 14 (7) ◽  
pp. 1780
Author(s):  
Sara Pettinato ◽  
Daniele Barettin ◽  
Vadim Sedov ◽  
Victor Ralchenko ◽  
Stefano Salvatori
Keyword(s):  
Diamond Film ◽  
Pressure Measurement ◽  
Microwave Plasma ◽  
Modulation Depth ◽  
Pressure Sensors ◽  
Chemical Properties ◽  
Film Surface ◽  
Full Scale ◽  
Sensing Element ◽  
Fabry Perot

Pressure sensors based on diamond membranes were designed and tested for gas pressure measurement up to 6.8 MPa. The diamond film (2” diameter, 6 μm thickness)—grown by microwave plasma chemical vapor deposition on a silicon substrate—was a starting material to produce an array of membranes with different diameters in the 130–400 μm range, in order to optimize the sensor performance. Each 5 mm × 5 mm sensing element was obtained by subsequent silicon slicing. The fixed film thickness, full-scale pressure range, and sensor sensitivity were established by a proper design of the diameter of diamond membrane which represents the sensing element for differential pressure measurement. The pressure-induced deflection of the membrane was optically measured using a Fabry-Pérot interferometer formed by a single mode optical fiber front surface and the deflecting diamond film surface. The optical response of the system was numerically simulated using geometry and the elastic properties of the diamond diaphragm, and was compared with the experiments. Depending on the diamond membrane’s diameter, the fabricated sensors displayed a good modulation depth of response over different full-scale ranges, from 3 to 300 bar. In view of the excellent mechanical, thermal, and chemical properties of diamond, such pressure sensors could be useful for performance in a harsh environment.

Novel MEMS Fabry-Perot Interferometric Pressure Sensors

2010 ◽  
Vol 638-642 ◽  
pp. 1009-1014 ◽  
Author(s):  
Ivan Padron ◽  
Anthony T. Fiory ◽  
Nuggehalli M. Ravindra
Keyword(s):  
Optical Fiber ◽  
Rigid Body ◽  
Pressure Sensors ◽  
Sensing Element ◽  
Micro Electro Mechanical Systems ◽  
Considerable Advantage ◽  
Fabry Perot ◽  
Mems Technology ◽  
Interferometric Sensor ◽  
Novel Design

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

Feasibility Study on UV YAG Laser Patterning on Diamond Film

2007 ◽  
Vol 364-366 ◽  
pp. 613-617
Author(s):  
Hung Yin Tsai ◽  
Chia Jen Ting ◽  
Kei Lin Kuo ◽  
Chang Pin Chou
Keyword(s):  
Diamond Film ◽  
Laser Processing ◽  
Microwave Plasma ◽  
Etching Rate ◽  
Film Surface ◽  
Chemical Vapor ◽  
Maintenance Cost ◽  
Yag Laser ◽  
Laser Patterning ◽  
Carbon Burning

The laser ablation technique is one option for micro-machining and patterning of diamond film. A UV YAG laser with higher energy density can remove or destroy the diamond film more efficiently than the excimer laser. That is, the UV YAG laser not only provides faster etching rate on the diamond film, but also requires less processing and maintenance cost. In the current study, synthetic diamond films with grain size of 30 μm were deposited on silicon substrate by microwave plasma enhanced chemical vapor deposition (MPCVD) in the CH4/H2 mixture atmosphere. A pulsed UV YAG laser (λ = 355 nm, 10 kHz) was employed to machine and remove the diamond film. The diamond film surface was analyzed by SEM and Raman spectroscopy after the laser machining. The beam size of YAG laser was adjusted to between 0.1 mm and 1.5 mm by the trepan mechanism to approach the following defined scanning width. In order to shape a 4-inch diamond wafer into a microstructure, the scanning width of the UV YAG laser was defined to 0.1 mm, 0.75 mm and to 1.5 mm in several loops. The results show that the laser-polishing effect can be applied to the pretreatment of mechanical polishing of diamond wafer in the condition of 0.75 mm scanning width in 3 loops. From Raman spectrum, it could prove the mechanism of carbon burning reaction during the laser processing and the residual carbon existing in the laser-patterned area. The surface of diamond film is strongly affected by the laser processing and a better result from the parameter of 0.75 mm scanning width in 3 loops is shown in the current study.

scholarly journals Miniature Implantable Pressure Sensors for Medical Applications

2010 ◽  
Vol 4 (2) ◽  
Author(s):  
Robert Stone ◽  
FranÃois Gardien ◽  
Antoine Filipe ◽  
Christian Pisella ◽  
Alain Roggi ◽  
...  
Keyword(s):  
Power Consumption ◽  
Fluid Pressure ◽  
Pressure Sensors ◽  
Form Factors ◽  
Full Scale ◽  
Absolute Pressure ◽  
Sensing Element ◽  
Sigma Delta ◽  
Temperature Range ◽  
Trade Offs

Pressure sensors are requisite for many medical implantable devices to monitor physiological pressures or fluid pressure and flow from a subsystem. Size, power consumption, accuracy, sensitivity, stability, and biocompatibility are all key considerations in the design and fabrication of such sensors. Conventional designs, based on piezoresistive technologies, are power consuming with significant drift and temperature error, whereas capacitive solutions are often cumbersome when packaged for biocompatibility. Tronics Microsystems has developed absolute pressure sensors, which achieve the benefits of both technologies. Miniaturization is achieved using a MEMS sensing element and a multifunction ASIC with small form factors. Low power consumption, low drift, high resolution, and waveform capture capability are obtained by using a capacitive MEMS coupled with a sigma-delta, direct capacitance to digital converter. Biocompatibility is achieved with grade II titanium packaging in two form factors (“tubular” or “pancake”) for incorporation into various applications. These sensors have been fabricated, calibrated, and tested extensively over physiologic temperature ranges. The design has achieved power consumption lower than 500 ÂμW at 100 Hz and a drift lower than 0.5% full scale per year. An accuracy of +/−1% full scale, over the temperature range is obtained by on-ASIC nonlinearity and temperature compensation. The two packaging configurations allow analysis of the trade-offs on the temperature range, sensitivity, volume, sterilization, etc. Different feed-through materials permit optimization of the form factors for the tube and the flat sensor and wired or wireless communication.

A NOVEL DESIGN OF SERPENTINE STRUCTURE FOR ENHANCED PERFORMANCE OF MEMS BASED PRESSURE SENSORS

2012 ◽  
pp. 64-67
Author(s):  
WINNE JERRY ◽  
P.ANITHA SARASWATHI
Keyword(s):  
Measurement System ◽  
Pressure Measurement ◽  
Pressure Range ◽  
Pressure Sensors ◽  
Silicon Membrane ◽  
Sensing Element ◽  
Tire Pressure ◽  
Automobile Tire ◽  
Novel Design ◽  
Pressure Measurement System

In this work an effective MEMS based capacitive pressure measurement system is proposed. Thepressure sensing element consists of two capacitorplates. Thebottom plate is mechanically fixed, whilethe upper plate is a flexible silicon membrane with flexures. The pressure acts on the upper plate. Avariable separation between the plates is introduced.Maximizing the deflection of the plate is a keyto improve the sensitivity of the sensor. In this paper various flexure designs are studied. A comparison of the flexure sensitivity is made for the automobile tire pressure range.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

Nano-Crystalline Diamond Films Deposited on Copper Substrate by MPCVD Method

2011 ◽  
Vol 117-119 ◽  
pp. 1310-1314
Author(s):  
Xing Rui Li ◽  
Xin Wei Shi ◽  
Ning Yao ◽  
Xin Chang Wang
Keyword(s):  
Diamond Film ◽  
Deposition Time ◽  
Microwave Plasma ◽  
Copper Substrate ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Annealing Process ◽  
Adhesive Properties ◽  
Plasma Chemical Vapor Deposition ◽  
Nano Crystalline

Nano-crystalline diamond (NCD) films with good adhesion were deposited on flexible copper substrate with Ni interlayer by Microwave Plasma Chemical Vapor Deposition (MPCVD). In this paper, two-stage method was used to improve the adhesion between the copper substrates and the diamond films. The effect of deposition time of the first stage on the morphology, crystal structure, non-diamond phase and adhesive properties of diamond films was investigated. The performance and structure of the diamond films were studied by Scanning Electron Microscope (SEM), Raman Spectroscopy (Raman) and X-Ray Diffraction (XRD). The results showed that the films were nano-crystalline diamond films positively. Impress method was used to examine the adhesion between diamond film and the substrate. When deposition time is 1.5h, the adhesion between diamond film and the copper substrate is better than the others. When it was 2.5h or longer, because the graphite layers existed as intermediate, the adherence between the diamond films and copper substrates was very poor. Therefore, the diamond films were easily peeled off from the substrates. Otherwise, the second stage called annealing process after the deposition played an important role to the adhesion. The films would be easily peeled off by curling without the annealing process.

Diagnostics of plasma ball formed in high pressure microwave plasma for diamond film synthesis

2002 ◽  
Vol 11 (3-6) ◽  
pp. 562-566 ◽  
Author(s):  
M. Nagatsu ◽  
M. Makino ◽  
M. Tanga ◽  
H. Sugai
Keyword(s):  
High Pressure ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Synthesis

Interference characteristics in a Fabry–Perot cavity with graphene membrane for optical fiber pressure sensors

2014 ◽  
Vol 21 (11) ◽  
pp. 2297-2306 ◽  
Author(s):  
Cheng Li ◽  
Jun Xiao ◽  
Tingting Guo ◽  
Shangchun Fan ◽  
Wei Jin
Keyword(s):  
Optical Fiber ◽  
Pressure Sensors ◽  
Graphene Membrane ◽  
Fabry Perot

scholarly journals Synthesis of Microwave Plasma CVD Diamond-Film on Variously-Coated Carbon-Steel Substrates.

1996 ◽  
Vol 47 (7) ◽  
pp. 611-615
Author(s):  
Hiroyuki TANAKA ◽  
Toshiaki TANAKA ◽  
Hideaki SOHMA ◽  
Masato YOSHIDA ◽  
Akira SAKAI ◽  
...  
Keyword(s):  
Carbon Steel ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Cvd Diamond ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Cvd Diamond Film ◽  
Steel Substrates ◽  
Coated Carbon
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