scholarly journals Kernel-Density-Based Particle Defect Management for Semiconductor Manufacturing Facilities

2018 ◽  
Vol 8 (2) ◽  
pp. 224 ◽  
Author(s):  
Seung Park ◽  
Sehoon Kim ◽  
Jun-Geol Baek
Keyword(s):  
Semiconductor Manufacturing ◽  
Kernel Density ◽  
Defect Management ◽  
Manufacturing Facilities

Odor control in semiconductor manufacturing facilities

2000 ◽  
Vol 19 (1) ◽  
pp. 42-52 ◽  
Author(s):  
Christopher O. Muller ◽  
Charles Thane Joyce ◽  
Michael N. Poppre
Keyword(s):  
Semiconductor Manufacturing ◽  
Odor Control ◽  
Manufacturing Facilities

Fast Scheduling of Semiconductor Manufacturing Facilities Using Case-Based Reasoning

2016 ◽  
Vol 29 (1) ◽  
pp. 22-32 ◽  
Author(s):  
Junseok Lim ◽  
Moon-Jung Chae ◽  
Yongseok Yang ◽  
In-Beom Park ◽  
Jaeyong Lee ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Case Based Reasoning ◽  
Manufacturing Facilities ◽  
Case Based
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