Odor control in semiconductor manufacturing facilities

Christopher O. Muller; Charles Thane Joyce; Michael N. Poppre

doi:10.1002/ep.670190117

Odor control in semiconductor manufacturing facilities

Environmental Progress ◽

10.1002/ep.670190117 ◽

2000 ◽

Vol 19 (1) ◽

pp. 42-52 ◽

Cited By ~ 3

Author(s):

Christopher O. Muller ◽

Charles Thane Joyce ◽

Michael N. Poppre

Keyword(s):

Semiconductor Manufacturing ◽

Odor Control ◽

Manufacturing Facilities

Download Full-text

A model predictive control approach for fab-wide scheduling in semiconductor manufacturing facilities

IFAC Proceedings Volumes ◽

10.3182/20130911-3-br-3021.00061 ◽

2013 ◽

Vol 46 (24) ◽

pp. 493-498 ◽

Cited By ~ 2

Author(s):

Hong Jang ◽

Tae Yeong Jung ◽

Kevin Yeh ◽

Jay H. Lee

Keyword(s):

Model Predictive Control ◽

Predictive Control ◽

Semiconductor Manufacturing ◽

Control Approach ◽

Manufacturing Facilities

Download Full-text

Development of an intelligent scheduler for semiconductor manufacturing facilities

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484359 ◽

2002 ◽

Author(s):

E. Schorn-DiSalvi ◽

R. Liquigan ◽

B.A. Peters ◽

J.S. Smith

Keyword(s):

Semiconductor Manufacturing ◽

Manufacturing Facilities

Download Full-text

Optimization of Lifter Operations for Inter-Line Transfers in Semiconductor Manufacturing Facilities

International Journal of Mechanical and Production Engineering Research and Development ◽

10.24247/ijmperdaug201819 ◽

2018 ◽

Vol 8 (4) ◽

pp. 167-178

Author(s):

Jinpyo Lee et al., Jinpyo Lee et al., ◽

Keyword(s):

Semiconductor Manufacturing ◽

Manufacturing Facilities

Download Full-text

Airborne PM2.5 characteristics in semiconductor manufacturing facilities

AIMS Environmental Science ◽

10.3934/environsci.2018.3.216 ◽

2018 ◽

Vol 5 (3) ◽

pp. 216-228 ◽

Cited By ~ 1

Author(s):

Kwang-Min Choi ◽

Keyword(s):

Semiconductor Manufacturing ◽

Manufacturing Facilities

Download Full-text

Improved contamination control in semiconductor manufacturing facilities

Microelectronics Reliability ◽

10.1016/0026-2714(84)90933-8 ◽

1984 ◽

Vol 24 (6) ◽

pp. 1099

Keyword(s):

Semiconductor Manufacturing ◽

Contamination Control ◽

Manufacturing Facilities

Download Full-text

A Reinforcement Learning Approach to Robust Scheduling of Semiconductor Manufacturing Facilities

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2019.2956762 ◽

2020 ◽

pp. 1-12

Author(s):

In-Beom Park ◽

Jaeseok Huh ◽

Joongkyun Kim ◽

Jonghun Park

Keyword(s):

Reinforcement Learning ◽

Semiconductor Manufacturing ◽

Learning Approach ◽

Robust Scheduling ◽

Manufacturing Facilities

Download Full-text

Multi-generation enhanced power quality design for semiconductor manufacturing facilities

2001 IEEE Power Engineering Society Winter Meeting Conference Proceedings (Cat No 01CH37194) PESW-01 ◽

10.1109/pesw.2001.917242 ◽

2002 ◽

Cited By ~ 1

Author(s):

D. Walsh ◽

P.R. LeGoy

Keyword(s):

Power Quality ◽

Semiconductor Manufacturing ◽

Quality Design ◽

Manufacturing Facilities

Download Full-text

Kernel-Density-Based Particle Defect Management for Semiconductor Manufacturing Facilities

Applied Sciences ◽

10.3390/app8020224 ◽

2018 ◽

Vol 8 (2) ◽

pp. 224 ◽

Cited By ~ 3

Author(s):

Seung Park ◽

Sehoon Kim ◽

Jun-Geol Baek

Keyword(s):

Semiconductor Manufacturing ◽

Kernel Density ◽

Defect Management ◽

Manufacturing Facilities

Download Full-text

Fast Scheduling of Semiconductor Manufacturing Facilities Using Case-Based Reasoning

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2015.2511798 ◽

2016 ◽

Vol 29 (1) ◽

pp. 22-32 ◽

Cited By ~ 8

Author(s):

Junseok Lim ◽

Moon-Jung Chae ◽

Yongseok Yang ◽

In-Beom Park ◽

Jaeyong Lee ◽

...

Keyword(s):

Semiconductor Manufacturing ◽

Case Based Reasoning ◽

Manufacturing Facilities ◽

Case Based

Download Full-text

An optimization approach to capacity expansion in semiconductor manufacturing facilities

International Journal of Production Research ◽

10.1080/002075499190095 ◽

1999 ◽

Vol 37 (15) ◽

pp. 3359-3382 ◽

Cited By ~ 53

Author(s):

Jonathan F. Bard ◽

Krishna Srinivasan ◽

Devanath Tirupati

Keyword(s):

Semiconductor Manufacturing ◽

Capacity Expansion ◽

Optimization Approach ◽

Manufacturing Facilities

Download Full-text