Development of an intelligent scheduler for semiconductor manufacturing facilities

2002 ◽  
Author(s):  
E. Schorn-DiSalvi ◽  
R. Liquigan ◽  
B.A. Peters ◽  
J.S. Smith
Keyword(s):  
Semiconductor Manufacturing ◽  
Manufacturing Facilities

Odor control in semiconductor manufacturing facilities

2000 ◽  
Vol 19 (1) ◽  
pp. 42-52 ◽  
Author(s):  
Christopher O. Muller ◽  
Charles Thane Joyce ◽  
Michael N. Poppre
Keyword(s):  
Semiconductor Manufacturing ◽  
Odor Control ◽  
Manufacturing Facilities

Fast Scheduling of Semiconductor Manufacturing Facilities Using Case-Based Reasoning

2016 ◽  
Vol 29 (1) ◽  
pp. 22-32 ◽  
Author(s):  
Junseok Lim ◽  
Moon-Jung Chae ◽  
Yongseok Yang ◽  
In-Beom Park ◽  
Jaeyong Lee ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Case Based Reasoning ◽  
Manufacturing Facilities ◽  
Case Based
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