scholarly journals Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates

2019 ◽  
Vol 68 (2) ◽  
pp. 126 ◽  
Author(s):  
A Alamgir ◽  
A Bogatov ◽  
M Yashin ◽  
V Podgursky
Keyword(s):  
Atomic Layer Deposition ◽  
Tribological Properties ◽  
Atomic Layer ◽  
Mechanical And Tribological Properties ◽  
Alumina Films ◽  
Layer Deposition

Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

2017 ◽  
Vol 35 (1) ◽  
pp. 01B117 ◽  
Author(s):  
Sebastian Franke ◽  
Matthias Baumkötter ◽  
Carsten Monka ◽  
Sebastian Raabe ◽  
Reinhard Caspary ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gas Barrier ◽  
Barrier Layers ◽  
Alumina Films ◽  
Layer Deposition

Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition

2018 ◽  
Vol 13 (9-10) ◽  
pp. 502-507
Author(s):  
A. A. Dedkova ◽  
N. A. Dyuzhev ◽  
V. Yu. Kireev ◽  
I. E. Klemente ◽  
A. V. Myakon’kikh ◽  
...  
Keyword(s):  
Laser Radiation ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Alumina Films ◽  
Layer Deposition

scholarly journals Tribological properties of thin films made by atomic layer deposition sliding against silicon

2018 ◽  
Vol 36 (1) ◽  
pp. 01A122 ◽  
Author(s):  
Lauri Kilpi ◽  
Oili M. E. Ylivaara ◽  
Antti Vaajoki ◽  
Xuwen Liu ◽  
Ville Rontu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tribological Properties ◽  
Atomic Layer ◽  
Layer Deposition

Thermo-mechanical properties of alumina films created using the atomic layer deposition technique

2010 ◽  
Vol 164 (1-2) ◽  
pp. 58-67 ◽  
Author(s):  
David C. Miller ◽  
Ross R. Foster ◽  
Shih-Hui Jen ◽  
Jacob A. Bertrand ◽  
Shawn J. Cunningham ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Alumina Films ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

scholarly journals Tunable Plasmonic Colours by Atomic Layer Deposition of Alumina

2018 ◽  
Author(s):  
Jean-Michel Guay ◽  
Antonio Calà Lesina ◽  
Graham Killaire ◽  
Peter Gordon ◽  
Choloong Hahn ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Time Domain ◽  
Finite Difference Time Domain ◽  
Color Space ◽  
Atomic Layer ◽  
Alumina Film ◽  
Alumina Films ◽  
Layer Deposition ◽  
Difference Time

We report the tuning of plasmonic colours on silver by controlling the thickness of alumina films deposited via atomic layer deposition. The colours are observed to shift with increasing alumina film thickness. Colour palettes produced with periodic topographical features are observed to recover their original vibrancy and Hue range after the deposition of a film thickness of ~ 60 nm while colours devoid of such topographical features are observed to gradually fade and their colour intensities are never recovered collapsing into a small visually unappealing region of the LCH color space. Analysis of the surfaces identifies the periodic topographical features as responsible for this behavior. Finite-difference time-domain simulations of flat and sine-modulated surfaces covered with nanoparticles and covered by a conformal alumina film were conducted to unravel the role played by the ALD thickness on the colour formation, where colour rotations and recovery were also observed. The coloured surfaces were evaluated for applications in colourimetric and radiometric sensing showing large sensitivities of up to 3.06/nm and 3.19 nm/nm, respectively. The colourimetric and radiometric sensitivities are ob-served to be colour dependent.

Tunable Plasmonic Colours by Atomic Layer Deposition of Alumina

2018 ◽  
Author(s):  
Jean-Michel Guay ◽  
Antonio Calà Lesina ◽  
Graham Killaire ◽  
Peter Gordon ◽  
Choloong Hahn ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Time Domain ◽  
Finite Difference Time Domain ◽  
Color Space ◽  
Atomic Layer ◽  
Alumina Film ◽  
Alumina Films ◽  
Layer Deposition ◽  
Difference Time

We report the tuning of plasmonic colours on silver by controlling the thickness of alumina films deposited via atomic layer deposition. The colours are observed to shift with increasing alumina film thickness. Colour palettes produced with periodic topographical features are observed to recover their original vibrancy and Hue range after the deposition of a film thickness of ~ 60 nm while colours devoid of such topographical features are observed to gradually fade and their colour intensities are never recovered collapsing into a small visually unappealing region of the LCH color space. Analysis of the surfaces identifies the periodic topographical features as responsible for this behavior. Finite-difference time-domain simulations of flat and sine-modulated surfaces covered with nanoparticles and covered by a conformal alumina film were conducted to unravel the role played by the ALD thickness on the colour formation, where colour rotations and recovery were also observed. The coloured surfaces were evaluated for applications in colourimetric and radiometric sensing showing large sensitivities of up to 3.06/nm and 3.19 nm/nm, respectively. The colourimetric and radiometric sensitivities are ob-served to be colour dependent.

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