Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

2017 ◽  
Vol 35 (1) ◽  
pp. 01B117 ◽  
Author(s):  
Sebastian Franke ◽  
Matthias Baumkötter ◽  
Carsten Monka ◽  
Sebastian Raabe ◽  
Reinhard Caspary ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gas Barrier ◽  
Barrier Layers ◽  
Alumina Films ◽  
Layer Deposition

Effect of heat-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer-coated paperboard

2011 ◽  
Vol 122 (4) ◽  
pp. 2221-2227 ◽  
Author(s):  
Terhi Hirvikorpi ◽  
Mika Vähä-Nissi ◽  
Jari Vartiainen ◽  
Paavo Penttilä ◽  
Juha Nikkola ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gas Barrier ◽  
Barrier Layers ◽  
Layer Deposition

Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer-coated paperboard

2010 ◽  
Vol 257 (3) ◽  
pp. 736-740 ◽  
Author(s):  
Terhi Hirvikorpi ◽  
Mika Vähä-Nissi ◽  
Ali Harlin ◽  
Jaana Marles ◽  
Ville Miikkulainen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gas Barrier ◽  
Barrier Layers ◽  
Layer Deposition ◽  
Pre Treatment

Encapsulation of organic solar cells with ultrathin barrier layers deposited by ozone-based atomic layer deposition

2010 ◽  
Vol 11 (12) ◽  
pp. 1896-1900 ◽  
Author(s):  
Smita Sarkar ◽  
Jason H. Culp ◽  
Jon T. Whyland ◽  
Margret Garvan ◽  
Veena Misra
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Organic Solar Cells ◽  
Atomic Layer ◽  
Barrier Layers ◽  
Layer Deposition

Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition

2018 ◽  
Vol 13 (9-10) ◽  
pp. 502-507
Author(s):  
A. A. Dedkova ◽  
N. A. Dyuzhev ◽  
V. Yu. Kireev ◽  
I. E. Klemente ◽  
A. V. Myakon’kikh ◽  
...  
Keyword(s):  
Laser Radiation ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Alumina Films ◽  
Layer Deposition

scholarly journals Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers

2015 ◽  
Vol 7 (40) ◽  
pp. 22525-22532 ◽  
Author(s):  
Anne-Marije Andringa ◽  
Alberto Perrotta ◽  
Koen de Peuter ◽  
Harm C. M. Knoops ◽  
Wilhelmus M. M. Kessels ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Barrier Layers ◽  
Layer Deposition
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