RADIO-FREQUENCY MULTI-MODE MICROMECHANICAL DISK RESONATORS IN 500NM THIN SILICON CARBIDE (SIC)
Keyword(s):
2015 ◽
Vol 136
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pp. 1409-1417
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Keyword(s):
1987 ◽
Vol 5
(5)
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pp. 2836-2841
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2016 ◽
Vol 66
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pp. 1-9
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