scholarly journals Effect of Ion Irradiation for Ni Films prepared on a Flexible Substrate Material Using Magnetron Sputtering with Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma

2015 ◽  
Vol 58 (8) ◽  
pp. 319-323 ◽  
Author(s):  
Sho MIYASHITA ◽  
Hiroshi TOYOTA
Keyword(s):  
Magnetron Sputtering ◽  
Inductively Coupled Plasma ◽  
Ion Irradiation ◽  
Flexible Substrate ◽  
Substrate Material ◽  
Plasma Confinement ◽  
Inductively Coupled ◽  
Magnetic Plasma

scholarly journals Synthesis of carbon nanowalls from a single-source metal-organic precursor

2018 ◽  
Vol 9 ◽  
pp. 1895-1905 ◽  
Author(s):  
André Giese ◽  
Sebastian Schipporeit ◽  
Volker Buck ◽  
Nicolas Wöhrl
Keyword(s):  
Surface Diffusion ◽  
Inductively Coupled Plasma ◽  
Chemical Vapor ◽  
Substrate Material ◽  
Single Source ◽  
Organic Precursor ◽  
Inductively Coupled ◽  
Deposition Parameters ◽  
Metal Organic ◽  
Carbon Nanowalls

In this work, the deposition of carbon nanowalls (CNWs) by inductively coupled plasma enhanced chemical vapor deposition (ICP-PECVD) is investigated. The CNWs are electrically conducting and show a large specific surface area, which is a key characteristic to make them interesting for sensors, catalytic applications or energy-storage systems. It was recently discovered that CNW films can be deposited by the use of the single-source metal-organic precursor aluminium acetylacetonate. This precursor is relatively unknown in combination with the ICP-PECVD deposition method in literature and, thus, based on our previous publication is further investigated in this work to better understand the influence of the various deposition parameters on the growth. Silicon, stainless steel, nickel and copper are used as substrate materials. The CNWs deposited are characterized by scanning electron microscopy (SEM), Raman spectroscopy and Auger electron spectroscopy (AES). The combination of bias voltage, the temperature of the substrate and the substrate material had a strong influence on the morphology of the graphitic carbon nanowall structures. With regard to these results, a first growth model for the deposition of CNWs by ICP-PECVD and aluminium acetylacetonate is proposed. This model explains the formation of four different morphologies (nanorods as well as thorny, straight and curled CNWs) by taking the surface diffusion into account. The surface diffusion depends on the particle energies and the substrate material and thus explains the influence of these parameters.

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