Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges

M. Dalvie; G. S. Selwyn; M. Surendra; C. R. Guarnieri; J. J. McGill

doi:10.1063/1.110174

Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges

Applied Physics Letters ◽

10.1063/1.110174 ◽

1993 ◽

Vol 63 (24) ◽

pp. 3279-3281 ◽

Cited By ~ 7

Author(s):

M. Dalvie ◽

G. S. Selwyn ◽

M. Surendra ◽

C. R. Guarnieri ◽

J. J. McGill

Keyword(s):

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Spatially Resolved ◽

Radio Frequency Discharges

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Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/12/124016 ◽

2010 ◽

Vol 43 (12) ◽

pp. 124016 ◽

Cited By ~ 29

Author(s):

J Schulze ◽

E Schüngel ◽

Z Donkó ◽

D Luggenhölscher ◽

U Czarnetzki

Keyword(s):

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Electron Dynamics ◽

Radio Frequency Discharges

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Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/46/44/445201 ◽

2013 ◽

Vol 46 (44) ◽

pp. 445201 ◽

Cited By ~ 12

Author(s):

Simon Steves ◽

Tim Styrnoll ◽

Felix Mitschker ◽

Stefan Bienholz ◽

Bibinov Nikita ◽

...

Keyword(s):

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Radio Frequency Discharges

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Sputter deposition of Titanium and Nickel thin films in radio frequency magnetron discharge characterized by optical emission spectroscopy and by Rutherford backscattering spectrometry

Thin Solid Films ◽

10.1016/j.tsf.2017.03.032 ◽

2017 ◽

Vol 629 ◽

pp. 22-27 ◽

Cited By ~ 3

Author(s):

M. Salhi ◽

S.E.K. Abaidia ◽

S. Mammeri ◽

B. Bouaouina

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Rutherford Backscattering Spectrometry ◽

Optical Emission ◽

Sputter Deposition ◽

Rutherford Backscattering ◽

Magnetron Discharge ◽

Nickel Thin Films

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Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Cited By ~ 12

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

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Evaluation of the Sputtered Copper Atomic Density and its Dependence on Target-Substrate Distance by Spatially Resolved Optical Emission Spectroscopy

Shinku ◽

10.3131/jvsj.47.277 ◽

2004 ◽

Vol 47 (3) ◽

pp. 277-280 ◽

Cited By ~ 1

Author(s):

Koji TANAKA ◽

Takeo NAKANO ◽

Shigeru BABA

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Atomic Density ◽

Substrate Distance ◽

Spatially Resolved

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Radio Frequency Glow Discharge Optical Emission Spectroscopy (rf-GD-OES)

Journal of the Japan Society of Colour Material ◽

10.4011/shikizai1937.79.75 ◽

2006 ◽

Vol 79 (2) ◽

pp. 75-80

Author(s):

Akihiro HIRANO

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge

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Si and SiO detection in a HMDSO/propane/air flame using spatially resolved optical emission spectroscopy (OES)

Journal of Quantitative Spectroscopy and Radiative Transfer ◽

10.1016/j.jqsrt.2012.08.020 ◽

2013 ◽

Vol 114 ◽

pp. 101-108 ◽

Cited By ~ 13

Author(s):

A. Burkert ◽

D. Müller ◽

W. Paa

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Spatially Resolved

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Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma

Vacuum ◽

10.1016/s0042-207x(99)00174-8 ◽

2000 ◽

Vol 56 (1) ◽

pp. 15-23 ◽

Cited By ~ 5

Author(s):

Michael D Whitfield ◽

Richard B Jackman ◽

J.S Foord

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Plasma ◽

Optical Emission ◽

Spatially Resolved

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Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

Analytical and Bioanalytical Chemistry ◽

10.1007/s00216-002-1378-8 ◽

2002 ◽

Vol 373 (7) ◽

pp. 656-663 ◽

Cited By ~ 12

Author(s):

Kenneth R. Marcus ◽

Alwyn B. Anfone ◽

Wandee Luesaiwong ◽

Teresa A. Hill ◽

Dvora Perahia ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Depth Profiling ◽

Optical Emission ◽

Radio Frequency Glow Discharge

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Monochromatic Imaging Camera and Technique for Spatially Resolved Optical Emission Spectroscopy

Instrumentation Science & Technology ◽

10.1080/10739149709351465 ◽

1997 ◽

Vol 25 (3) ◽

pp. 245-254 ◽

Cited By ~ 1

Author(s):

Willard A. Hareland

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Monochromatic Imaging ◽

Spatially Resolved ◽

Imaging Camera

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