scholarly journals Improving computer simulation of vacuum pumping process of the plasma sputtering system

2021 ◽  
Keyword(s):  
Computer Simulation ◽  
Plasma Sputtering ◽  
Sputtering System

scholarly journals Characteristics and Operation Conditions of a Closed-Field Unbalanced Dual Magnetrons Plasma Sputtering System

OALib ◽  
2014 ◽  
Vol 01 (04) ◽  
pp. 1-7 ◽  
Author(s):  
Bahaa T. Chiad ◽  
Mohammad K. Khalaf ◽  
Firas J. Kadhim ◽  
Oday A. Hammadi
Keyword(s):  
Closed Field ◽  
Plasma Sputtering ◽  
Operation Conditions ◽  
Sputtering System

Helicon plasma sputtering system for fabrication of multilayer x‐ray mirrors

1995 ◽  
Vol 66 (2) ◽  
pp. 2141-2143 ◽  
Author(s):  
Masaki Koike ◽  
Mitsukuni Chiwaki ◽  
Isao H. Suzuki ◽  
Naoto Kobayashi
Keyword(s):  
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X Ray ◽  
Plasma Sputtering ◽  
Sputtering System

Plasma sputtering system for deposition of thin film combinatorial libraries

2005 ◽  
Vol 76 (6) ◽  
pp. 062221 ◽  
Author(s):  
James S. Cooper ◽  
Guanghai Zhang ◽  
Paul J. McGinn
Keyword(s):  
Thin Film ◽  
Combinatorial Libraries ◽  
Plasma Sputtering ◽  
Sputtering System
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