Spatial survey of a magnetron plasma sputtering system using a Langmuir probe

2002 ◽  
Vol 20 (6) ◽  
pp. 2032 ◽  
Author(s):  
D. J. Field ◽  
S. K. Dew ◽  
R. E. Burrell
Keyword(s):  
Langmuir Probe ◽  
Plasma Sputtering ◽  
Sputtering System

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System

2017 ◽  
Vol 48 (1) ◽  
pp. 61-66 ◽  
Author(s):  
Julio César Sagás ◽  
Rodrigo Sávio Pessoa ◽  
Homero Santiago Maciel
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System

scholarly journals Characteristics and Operation Conditions of a Closed-Field Unbalanced Dual Magnetrons Plasma Sputtering System

OALib ◽  
2014 ◽  
Vol 01 (04) ◽  
pp. 1-7 ◽  
Author(s):  
Bahaa T. Chiad ◽  
Mohammad K. Khalaf ◽  
Firas J. Kadhim ◽  
Oday A. Hammadi
Keyword(s):  
Closed Field ◽  
Plasma Sputtering ◽  
Operation Conditions ◽  
Sputtering System

Helicon plasma sputtering system for fabrication of multilayer x‐ray mirrors

1995 ◽  
Vol 66 (2) ◽  
pp. 2141-2143 ◽  
Author(s):  
Masaki Koike ◽  
Mitsukuni Chiwaki ◽  
Isao H. Suzuki ◽  
Naoto Kobayashi
Keyword(s):  
Helicon Plasma ◽  
X Ray ◽  
Plasma Sputtering ◽  
Sputtering System

Automatic Langmuir probe measurement in a magnetron sputtering system

1999 ◽  
Vol 116-119 ◽  
pp. 1083-1088 ◽  
Author(s):  
M. Spolaore ◽  
V. Antoni ◽  
M. Bagatin ◽  
A. Buffa ◽  
R. Cavazzana ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Probe Measurement ◽  
Sputtering System

Plasma sputtering system for deposition of thin film combinatorial libraries

2005 ◽  
Vol 76 (6) ◽  
pp. 062221 ◽  
Author(s):  
James S. Cooper ◽  
Guanghai Zhang ◽  
Paul J. McGinn
Keyword(s):  
Thin Film ◽  
Combinatorial Libraries ◽  
Plasma Sputtering ◽  
Sputtering System
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