scholarly journals Microwave Discharge Oxygen Ion Source for Ionospheric Plasma Environment Simulation

2004 ◽  
Vol 52 (610) ◽  
pp. 528-534
Author(s):  
Hiroshi Hayashi ◽  
Mengu Cho ◽  
Kazutaka Nishiyama ◽  
Hitoshi Kuninaka
Keyword(s):  
Ionospheric Plasma ◽  
Microwave Discharge ◽  
Ion Source ◽  
Plasma Environment ◽  
Oxygen Ion ◽  
Environment Simulation

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

Development of oxygen ion source with microwave plasma cathode

1992 ◽  
Vol 63 (4) ◽  
pp. 2595-2597 ◽  
Author(s):  
Yoshio Matsubara ◽  
Hideaki Tahara ◽  
Masato Takahashi ◽  
Shuichi Nogawa ◽  
Junzo Ishikawa
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

The Synthesis of Metal Oxide Films from Compound Powder Targets

1991 ◽  
Vol 236 ◽  
Author(s):  
A.I. Stognij ◽  
V.V. Tokarev ◽  
Yu.N. Mitin
Keyword(s):  
Metal Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Source ◽  
Cold Cathode ◽  
Metal Oxide Films ◽  
Oxygen Ion ◽  
Microscopy Investigation ◽  
Electron Microscopy Investigation ◽  
Cold Cathode Ion Source

AbstractThe paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.

scholarly journals Electrical conductivity of the thermal dusty plasma under the conditions of a hybrid plasma environment simulation facility

2015 ◽  
Vol 17 (5) ◽  
pp. 053041 ◽  
Author(s):  
Dmitry I Zhukhovitskii ◽  
Oleg F Petrov ◽  
Truell W Hyde ◽  
Georg Herdrich ◽  
Rene Laufer ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Dusty Plasma ◽  
Plasma Environment ◽  
Hybrid Plasma ◽  
Environment Simulation

Plasma cathode oxygen‐ion source

1991 ◽  
Vol 62 (12) ◽  
pp. 2890-2894 ◽  
Author(s):  
Takehisa Shibuya
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion
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