Development of oxygen ion source with microwave plasma cathode

1992 ◽  
Vol 63 (4) ◽  
pp. 2595-2597 ◽  
Author(s):  
Yoshio Matsubara ◽  
Hideaki Tahara ◽  
Masato Takahashi ◽  
Shuichi Nogawa ◽  
Junzo Ishikawa
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Improvement of the gas efficiency in a microwave plasma cathode type oxygen ion source

1994 ◽  
Vol 65 (4) ◽  
pp. 1313-1315 ◽  
Author(s):  
Koji Miyake ◽  
Takashi Mikami ◽  
Hideaki Tahara ◽  
Kiyoshi Ogata ◽  
Yoshio Matsubara ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion ◽  
Gas Efficiency

Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source

1994 ◽  
Vol 65 (4) ◽  
pp. 1127-1128 ◽  
Author(s):  
Yusheng Rao ◽  
Jiannan Wu ◽  
Yuhong Yan ◽  
Yong Zhang ◽  
Lei Qi
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Discharge Mechanism ◽  
Microwave Ion Source

Plasma cathode oxygen‐ion source

1991 ◽  
Vol 62 (12) ◽  
pp. 2890-2894 ◽  
Author(s):  
Takehisa Shibuya
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

ION ENERGY DISTRIBUTION OF PLASMA CATHODE OXYGEN–ION SOURCE

1993 ◽  
pp. 487-490
Author(s):  
Takehisa Shibuya ◽  
Shizuyo Hashimoto ◽  
Hideshi Yokota ◽  
Eiji Yabe ◽  
Kazuo Takayama
Keyword(s):  
Energy Distribution ◽  
Ion Source ◽  
Plasma Cathode ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Oxygen Ion

OXYGEN ION SOURCE WITH MICROWAVE PLASMA (MP) CATHODE FOR ION BEAM ASSISTED DEPOSITION

1993 ◽  
pp. 475-478
Author(s):  
Yoshio Matsubara ◽  
Koji Miyake ◽  
Hideaki Tahara ◽  
Shuichi Nogawa ◽  
Junzo Ishikawa
Keyword(s):  
Microwave Plasma ◽  
Ion Beam ◽  
Ion Source ◽  
Oxygen Ion ◽  
Ion Beam Assisted Deposition

A microwave plasma cathode for the high‐current CHORDIS ion source

1996 ◽  
Vol 67 (3) ◽  
pp. 1344-1346 ◽  
Author(s):  
G. Cojocaru ◽  
B. H. Wolf ◽  
H. Emig
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
High Current ◽  
Plasma Cathode

Oxygen ion source with plasma cathode

1992 ◽  
Vol 70 (1-4) ◽  
pp. 208-212
Author(s):  
E. Yabe ◽  
K. Takahashi ◽  
K. Takagi ◽  
K. Takayama
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Plasma cathode oxygen ion source

1991 ◽  
Vol 55 (1-4) ◽  
pp. 305-309 ◽  
Author(s):  
Takehisa Shibuya ◽  
Shizuyo Hashimoto ◽  
Eiji Yabe ◽  
Kazuo Takayama
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Bucket type ion source using a microwave plasma cathode

1989 ◽  
Vol 37-38 ◽  
pp. 143-146 ◽  
Author(s):  
Yoshimi Hakamata ◽  
Takashi Iga ◽  
Ken'ichi Natsui ◽  
Tadashi Sato
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode
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