Plasma cathode oxygen‐ion source

1991 ◽  
Vol 62 (12) ◽  
pp. 2890-2894 ◽  
Author(s):  
Takehisa Shibuya
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Development of oxygen ion source with microwave plasma cathode

1992 ◽  
Vol 63 (4) ◽  
pp. 2595-2597 ◽  
Author(s):  
Yoshio Matsubara ◽  
Hideaki Tahara ◽  
Masato Takahashi ◽  
Shuichi Nogawa ◽  
Junzo Ishikawa
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

ION ENERGY DISTRIBUTION OF PLASMA CATHODE OXYGEN–ION SOURCE

1993 ◽  
pp. 487-490
Author(s):  
Takehisa Shibuya ◽  
Shizuyo Hashimoto ◽  
Hideshi Yokota ◽  
Eiji Yabe ◽  
Kazuo Takayama
Keyword(s):  
Energy Distribution ◽  
Ion Source ◽  
Plasma Cathode ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Oxygen Ion

Oxygen ion source with plasma cathode

1992 ◽  
Vol 70 (1-4) ◽  
pp. 208-212
Author(s):  
E. Yabe ◽  
K. Takahashi ◽  
K. Takagi ◽  
K. Takayama
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Plasma cathode oxygen ion source

1991 ◽  
Vol 55 (1-4) ◽  
pp. 305-309 ◽  
Author(s):  
Takehisa Shibuya ◽  
Shizuyo Hashimoto ◽  
Eiji Yabe ◽  
Kazuo Takayama
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion

Improvement of the gas efficiency in a microwave plasma cathode type oxygen ion source

1994 ◽  
Vol 65 (4) ◽  
pp. 1313-1315 ◽  
Author(s):  
Koji Miyake ◽  
Takashi Mikami ◽  
Hideaki Tahara ◽  
Kiyoshi Ogata ◽  
Yoshio Matsubara ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Ion Source ◽  
Plasma Cathode ◽  
Oxygen Ion ◽  
Gas Efficiency

Ion-emission properties of a plasma in a gaseous-ion source with a plasma cathode

2004 ◽  
Vol 49 (1) ◽  
pp. 19-21
Author(s):  
N. V. Gavrilov ◽  
A. S. Kamenetskikh
Keyword(s):  
Ion Source ◽  
Plasma Cathode ◽  
Emission Properties ◽  
Ion Emission

Large-Area Doping for Poly-Si Thin Film Transistors Using Bucket Ion Source with an RF Plasma Cathode

1991 ◽  
Vol 30 (Part 2, No. 4B) ◽  
pp. L772-L774
Author(s):  
Genshiro Kawachi ◽  
Takashi Aoyama ◽  
Takaya Suzuki ◽  
Yasunori Ohno ◽  
Akio Mimura ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Ion Source ◽  
Rf Plasma ◽  
Large Area ◽  
Plasma Cathode ◽  
Si Thin Film

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source
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