The Synthesis of Metal Oxide Films from Compound Powder Targets

1991 ◽  
Vol 236 ◽  
Author(s):  
A.I. Stognij ◽  
V.V. Tokarev ◽  
Yu.N. Mitin
Keyword(s):  
Metal Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Source ◽  
Cold Cathode ◽  
Metal Oxide Films ◽  
Oxygen Ion ◽  
Microscopy Investigation ◽  
Electron Microscopy Investigation ◽  
Cold Cathode Ion Source

AbstractThe paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.

Hollow Cold Cathode Ion Source for Reactive Ion-Beam Etching

1989 ◽  
Vol 158 ◽  
Author(s):  
A.I. Stognij ◽  
V.V. Tokarev
Keyword(s):  
Ion Beam ◽  
High Vacuum ◽  
Ion Source ◽  
Operating Parameters ◽  
Cold Cathode ◽  
Plasma Emitter ◽  
Ion Beam Etching ◽  
Pressure Discharge ◽  
Reactive Gas ◽  
Cold Cathode Ion Source

ABSTRACTA wide-aperture reactive gas ion source has been developed for various ion-beam processings in high vacuum (p < < 5×10−2 Pa). The peculiar feature of the ion source is that two-stage self-maintained low-pressure discharge is used here as a plasma emitter. This provides high operating parameters of the source along with simple diode-type structure.

Scalable Oxygen-Ion Transport Kinetics in Metal-Oxide Films: Impact of Thermally Induced Lattice Compaction in Acceptor Doped Ceria Films

2014 ◽  
Vol 24 (11) ◽  
pp. 1562-1574 ◽  
Author(s):  
Jennifer L. M. Rupp ◽  
Emiliana Fabbri ◽  
Dario Marrocchelli ◽  
Jeong-Woo Han ◽  
Di Chen ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Ion Transport ◽  
Oxide Films ◽  
Transport Kinetics ◽  
Doped Ceria ◽  
Metal Oxide Films ◽  
Thermally Induced ◽  
Oxygen Ion

Photoluminescence of RE-doped thin metal oxide films

2005 ◽  
Vol 2 (1) ◽  
pp. 326-329 ◽  
Author(s):  
S. Lange ◽  
I. Sildos ◽  
V. Kiisk ◽  
J. Aarik ◽  
M. Kirm
Keyword(s):  
Metal Oxide ◽  
Oxide Films ◽  
Thin Metal ◽  
Metal Oxide Films

Transition metal oxide films prepared by pulsed laser deposition for atomic beam detection

1996 ◽  
Vol 281-282 ◽  
pp. 453-456 ◽  
Author(s):  
M. Tanaka ◽  
M. Mukai ◽  
Y. Fujimori ◽  
M. Kondoh ◽  
Y. Tasaka ◽  
...  
Keyword(s):  
Transition Metal ◽  
Metal Oxide ◽  
Pulsed Laser Deposition ◽  
Atomic Beam ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Transition Metal Oxide ◽  
Laser Deposition ◽  
Metal Oxide Films
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