THERMAL ASPECTS OF TRANSPORT IN CHEMICAL VAPOR DEPOSITION REACTORS: A TWO-DIMENSIONAL MODEL INCLUDING MULTICOMPONENT DIFFUSION AND SPECIES INTERDIFFUSION

1994 ◽  
Author(s):  
Gregory H. Evans ◽  
Ralph Greif
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Multicomponent Diffusion ◽  
Two Dimensional ◽  
Dimensional Model ◽  
Two Dimensional Model

Two-dimensional model of a large area, inductively coupled, rectangular plasma source for chemical vapor deposition

1999 ◽  
Vol 27 (5) ◽  
pp. 1317-1328 ◽  
Author(s):  
J.L. Giuliani ◽  
V.A. Shamamian ◽  
R.E. Thomas ◽  
J.P. Apruzese ◽  
M. Mulbrandon ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Source ◽  
Two Dimensional ◽  
Dimensional Model ◽  
Large Area ◽  
Inductively Coupled ◽  
Two Dimensional Model

Plasma-Enhanced Chemical Vapor Deposition of Two-Dimensional Materials for Applications

2021 ◽  
Vol 54 (4) ◽  
pp. 1011-1022
Author(s):  
Kongyang Yi ◽  
Donghua Liu ◽  
Xiaosong Chen ◽  
Jun Yang ◽  
Dapeng Wei ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Two Dimensional ◽  
Two Dimensional Materials
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