Two-dimensional model for thermal plasma chemical vapor deposition

1995 ◽  
Vol 16 (S1) ◽  
pp. S57-S69 ◽  
Author(s):  
D. Kolman ◽  
J. Heberlein ◽  
E. Pfender ◽  
R. Young
Keyword(s):  
Chemical Vapor Deposition ◽  
Thermal Plasma ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Two Dimensional ◽  
Dimensional Model ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Two Dimensional Model

Two-dimensional model of a large area, inductively coupled, rectangular plasma source for chemical vapor deposition

1999 ◽  
Vol 27 (5) ◽  
pp. 1317-1328 ◽  
Author(s):  
J.L. Giuliani ◽  
V.A. Shamamian ◽  
R.E. Thomas ◽  
J.P. Apruzese ◽  
M. Mulbrandon ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Source ◽  
Two Dimensional ◽  
Dimensional Model ◽  
Large Area ◽  
Inductively Coupled ◽  
Two Dimensional Model

scholarly journals Thermal Plasma Chemical Vapor Deposition of SiC.

1995 ◽  
Vol 35 (11) ◽  
pp. 1381-1387 ◽  
Author(s):  
Yoshitaka Kojima ◽  
Yasutaka Andoo ◽  
Masayuki Doi
Keyword(s):  
Chemical Vapor Deposition ◽  
Thermal Plasma ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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