scholarly journals Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 5. Polymerization in Fluorocarbon Plasmas.

1999 ◽  
Vol 75 (7) ◽  
pp. 800-812 ◽  
Author(s):  
Eva STOFFELS ◽  
Winfred W. STOFFELS ◽  
Kunihide TACHIBANA
Author(s):  
Ramin Sattari ◽  
Stephan Barcikowski ◽  
Thomas Püster ◽  
Andreas Ostendorf ◽  
Heinz Haferkamp

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