Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 5. Polymerization in Fluorocarbon Plasmas.
1999 ◽
Vol 75
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pp. 800-812
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1999 ◽
Vol 75
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pp. 792-799
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1999 ◽
Vol 75
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pp. 779-784
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Keyword(s):
1999 ◽
Vol 75
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pp. 777-778
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1999 ◽
Vol 75
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pp. 821-829
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Keyword(s):