scholarly journals Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 2. Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces.

1999 ◽  
Vol 75 (7) ◽  
pp. 779-784 ◽  
Author(s):  
Hirotaka TOYODA ◽  
Hideo SUGAI
Keyword(s):  
Material Processing ◽  
Gas Phase ◽  
Solid Surfaces ◽  
Fluorocarbon Plasmas ◽  
Radical Production

Etching Reactions at Solid Surfaces

1984 ◽  
Vol 38 ◽  
Author(s):  
Harold F. Winters ◽  
J. W. Coburn
Keyword(s):  
Experimental Data ◽  
Conceptual Framework ◽  
Gas Phase ◽  
Ion Bombardment ◽  
Solid Surfaces ◽  
Plasma Environment

AbstractAn understanding of etching reactions in a plasma environment requires a knowledge of: (1) the types of gas phase particles which react at the surface, (2) the etch products formed, and (3) the processes which lead from reactants to products. Experimental data relavant to these topics are reviewed in this paper. A conceptual framework for understanding the etching reaction is reviewed and it is shown that the experimental data presently available is consistent with this framework. The influence of ion bombardment on etching reactions is extensively discussed.

Gas-phase studies in inductively coupled fluorocarbon plasmas

2001 ◽  
Vol 19 (6) ◽  
pp. 2946 ◽  
Author(s):  
M. Schaepkens ◽  
I. Martini ◽  
E. A. Sanjuan ◽  
X. Li ◽  
G. S. Oehrlein ◽  
...  
Keyword(s):  
Gas Phase ◽  
Inductively Coupled ◽  
Fluorocarbon Plasmas
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