scholarly journals Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 3. Mechanism of Fluorocarbon Gas Dissociation in Plasma.

1999 ◽  
Vol 75 (7) ◽  
pp. 785-791
Author(s):  
Hisataka HAYASHI ◽  
Makoto SEKINE
Keyword(s):  
Material Processing ◽  
Fluorocarbon Plasmas

Intelligent, low-cost system for fume control during laser material processing

2005 ◽  
Author(s):  
Ramin Sattari ◽  
Stephan Barcikowski ◽  
Thomas Püster ◽  
Andreas Ostendorf ◽  
Heinz Haferkamp
Keyword(s):  
Material Processing ◽  
Low Cost ◽  
Laser Material Processing ◽  
Laser Material ◽  
Cost System
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