Gas-phase studies in inductively coupled fluorocarbon plasmas

2001 ◽  
Vol 19 (6) ◽  
pp. 2946 ◽  
Author(s):  
M. Schaepkens ◽  
I. Martini ◽  
E. A. Sanjuan ◽  
X. Li ◽  
G. S. Oehrlein ◽  
...  
Keyword(s):  
Gas Phase ◽  
Inductively Coupled ◽  
Fluorocarbon Plasmas

Effect of etching on dielectric constant and surface composition of SiCOH low-k films in inductively coupled fluorocarbon plasmas

2009 ◽  
Vol 517 (14) ◽  
pp. 3942-3946 ◽  
Author(s):  
Sungwoo Lee ◽  
Jihyung Woo ◽  
Donggeun Jung ◽  
Jaeyoung Yang ◽  
Jin-hyo Boo ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Surface Composition ◽  
Inductively Coupled ◽  
Fluorocarbon Plasmas ◽  
Low K

scholarly journals Study of the SiO2-to-Si3N4 etch selectivity mechanism in inductively coupled fluorocarbon plasmas and a comparison with the SiO2-to-Si mechanism

1999 ◽  
Vol 17 (1) ◽  
pp. 26-37 ◽  
Author(s):  
M. Schaepkens ◽  
T. E. F. M. Standaert ◽  
N. R. Rueger ◽  
P. G. M. Sebel ◽  
G. S. Oehrlein ◽  
...  
Keyword(s):  
Inductively Coupled ◽  
Fluorocarbon Plasmas

Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas

2004 ◽  
Vol 22 (3) ◽  
pp. 689 ◽  
Author(s):  
E. A. Joseph ◽  
B. Zhou ◽  
S. P. Sant ◽  
L. J. Overzet ◽  
M. J. Goeckner
Keyword(s):  
Inductively Coupled ◽  
Fluorocarbon Plasmas ◽  
Wall Interactions

scholarly journals Ligation kinetics as a probe for gas-phase ligand field effects: Ligation of atomic transition metal cations with ammonia at room temperature

2019 ◽  
Vol 25 (1) ◽  
pp. 44-49 ◽  
Author(s):  
Voislav Blagojevic ◽  
Vitali V Lavrov ◽  
Gregory K Koyanagi ◽  
Diethard K Bohme
Keyword(s):  
Transition Metal ◽  
Gas Phase ◽  
Strong Correlation ◽  
Inductively Coupled Plasma ◽  
Metal Cations ◽  
Ligand Field ◽  
Transition Metal Cations ◽  
Inductively Coupled ◽  
Field Effects ◽  
Selected Ion Flow Tube

The kinetics of ammonia ligation to atomic first and second row transition metal cations were measured in an attempt to assess the role of ligand field effects in gas-phase ion-molecule reaction kinetics. Measurements were performed at 295 ± 2 K in helium bath gas at 0.35 Torr using an inductively coupled plasma/selected-ion flow tube tandem mass spectrometer. The atomic cations were produced at ca. 5500 K in an inductively coupled plasma source and were allowed to decay radiatively and to thermalize by collisions with argon and helium atoms prior to reaction. A strong correlation was observed across the periodic table between the measured rate coefficients for ammonia ligation and measured/calculated bond dissociation energies. A similar strong correlation is seen with the ligand field stabilization energy. So ligand field stabilization energies should provide a useful predictor of relative rates of ligation of atomic metal ions.

Attenuation of Polyatomic Ion Interferences in Inductively Coupled Plasma Mass Spectrometry by Gas-Phase Collisions

1989 ◽  
Vol 43 (6) ◽  
pp. 976-980 ◽  
Author(s):  
John T. Rowan ◽  
R. S. Houk
Keyword(s):  
Mass Spectrometry ◽  
Gas Phase ◽  
Inductively Coupled Plasma ◽  
Low Energy ◽  
Polyatomic Ions ◽  
Inductively Coupled ◽  
Ion Molecule Reactions ◽  
Plasma Mass Spectrometry ◽  
Background Ions

A double quadrupole arrangement to remove polyatomic ions by collisions with an added target gas has been evaluated. The ions Ar2+, ArO+, and ArN+ were attenuated by factors of 50–400 to count rates of ≤100 counts s−1. Fifty to seventy percent of the analyte ions were retained. Removal of polyatomic ions and retention of analyte ions were favored by low-energy collisions with Xe or CH4 rather than typical target gases like N2 or Ar. Products of ion-molecule reactions between background ions and target gas in the first quadrupole could be observed.

Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas

2003 ◽  
Vol 21 (1) ◽  
pp. 251-264 ◽  
Author(s):  
S.-M. Suh ◽  
S. L. Girshick ◽  
U. R. Kortshagen ◽  
M. R. Zachariah
Keyword(s):  
Gas Phase ◽  
Inductively Coupled ◽  
Phase Nucleation
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