Channel engineering and junction overlap issues for ultra-shallow junctions formed by SPER in the 45 nm CMOS technology node

2004 ◽  
Vol 810 ◽  
Author(s):  
Simone Severi ◽  
Kirklen Henson ◽  
Richard Lindsay ◽  
Anne Lauwers ◽  
Bartek J. Pawlak ◽  
...  
Keyword(s):  
Good Control ◽  
Cmos Technology ◽  
Technology Node ◽  
Reasonable Alternative ◽  
Shallow Junctions ◽  
Channel Engineering ◽  
Ultra Shallow Junctions ◽  
And Performance ◽  
Spike Anneal

ABSTRACTThe feasibility of the SPER junction process as a reasonable alternative to the spike anneal junction is proved in this work. Good control of the SCE and performance competitive results as compared to the spike junction are obtained. An analysis of the interaction between the halo dopant and the SPER junctions has been carried out; it is shown that the performance degrades with increasing halo dose as a consequence of an overlap resistance problem.

Fabrication of N+/P ultra-shallow junctions by plasma doping for 65 nm CMOS technology

2004 ◽  
Vol 186 (1-2) ◽  
pp. 17-20 ◽  
Author(s):  
F Lallement ◽  
A Grouillet ◽  
M Juhel ◽  
J.-P Reynard ◽  
D Lenoble ◽  
...  
Keyword(s):  
Cmos Technology ◽  
Plasma Doping ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Formation of Ultra-Shallow Junctions by Advanced Plasma Doping Techniques

2011 ◽  
Author(s):  
G. D. Papasouliotis ◽  
L. Godet ◽  
V. Singh ◽  
R. Miura ◽  
H. Ito ◽  
...  
Keyword(s):  
Plasma Doping ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

2004 ◽  
Vol 22 (1) ◽  
pp. 306 ◽  
Author(s):  
R. Lindsay ◽  
K. Henson ◽  
W. Vandervorst ◽  
K. Maex ◽  
B. J. Pawlak ◽  
...  
Keyword(s):  
Solid Phase ◽  
Epitaxial Regrowth ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Photoluminescence Characterization of Defects in Rapidly Annealed Ultra Shallow Junctions

2013 ◽  
Vol 2 (5) ◽  
pp. P195-P204 ◽  
Author(s):  
Masahiro Yoshimoto ◽  
Masashi Okutani ◽  
Gota Murai ◽  
Shuji Tagawa ◽  
Hiroki Saikusa ◽  
...  
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions

Defects in Ultra-Shallow Junctions

2008 ◽  
Author(s):  
Mark Law ◽  
Renata Camillo-Castillo ◽  
Lance Robertson ◽  
Kevin Jones
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions
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