Defects in Microelectronic Materials and Devices
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Published By CRC Press

9781420043761, 9781420043778
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From 3D Imaging of Atoms to Macroscopic Device Properties

2008 ◽  
Author(s):  
M Chisholm ◽  
K van Benthem ◽  
A Marinopoulos ◽  
Sokrates Pantelides
Keyword(s):  
3D Imaging ◽  
Device Properties

Defects in Ultra-Shallow Junctions

2008 ◽  
Author(s):  
Mark Law ◽  
Renata Camillo-Castillo ◽  
Lance Robertson ◽  
Kevin Jones
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions

Impact of Radiation-Induced Defects on Bipolar Device Operation

2008 ◽  
Author(s):  
Ronald Schrimpf ◽  
Daniel Fleetwood ◽  
Ronald Pease ◽  
Leonidas Tsetseris ◽  
Sokrates Pantelides
Keyword(s):  
Radiation Induced ◽  
Induced Defects ◽  
Device Operation ◽  
Bipolar Device

Structural Defects in SiO2–Si Caused by Ion Bombardment

2008 ◽  
Author(s):  
Antoine Touboul ◽  
Aminata Carvalho ◽  
Mathias Marinoni ◽  
Frederic Saigne ◽  
Jacques Bonnet ◽  
...  
Keyword(s):  
Ion Bombardment ◽  
Structural Defects

Defects in Thin and Ultrathin Silicon Dioxides

2008 ◽  
Author(s):  
Giorgio Cellere ◽  
Simone Gerardin ◽  
Alessandro Paccagnella
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