Sem and Aes Analysis of Ion Implanted Graphite

1981 ◽  
Vol 7 ◽  
Author(s):  
M. Shayegan ◽  
B.S. Elman ◽  
H. Mazurek ◽  
M.S. Dresselhaus ◽  
G. Dresselhaus

ABSTRACTIon-implantation of graphite is characterized with respect to lattice damage and the distribution of implanted ions. Both the depth profile of the implanted ions and of the lattice damage are shown to follow the models previously developed for ion-implanted semiconductors. Auger electron spectroscopy (AES) is used to monitor the implantation profile. The surface damage is examined by scanning electron microscopy (SEM) while microcrystalline regions in an amorphous background are observed by scanning transmission electron microscopy (STEM).

Author(s):  
J. R. Michael ◽  
D. B. Williams

Bismuth is known to segregate to grain boundaries in copper resulting in embrittlement and intergranular failure at low stress levels. This segregation has been studied primarily by Auger Electron Spectroscopy (AES). The applicability of scanning transmission electron microscopy (STEM)and Energy Dispersive Spectroscopy (EDS) to the study of equilibrium grain boundary segregation has already been demonstrated and the aim of this study is to determine the degree of segregation as a function of time and temperature. The major advantage of STEM over AES is that STEM does not require fracturing of the specimen, so the boundaries to be studied are left undisturbed. Thus, this technique is also applicable to systems which do not exhibit intergranular fracture.Cu-Bi specimens were prepared by evaporating Bi onto both sides of 3mm Cu discs, which were then heated for 1 week at 400°C to allow the Bi to diffuse into the Cu. The samples were then aged at 450, 550, 600, 650, and 700°C for 3 days and 12 days, ion-thinned and then examined in a Philips EM 400T TEM/STEM with an EDAX detector and EDAX 9100 analyzer. If necessary, the specimens were tilted such that the boundaries were parallel to the electron beam.


Author(s):  
Carolyn F. H. Gondran ◽  
Dennis F. Paul ◽  
Sanjit K. Das ◽  
Brendan J. Foran ◽  
Mark H. Clark

Abstract A framework is presented for considering the relative strengths of Auger electron spectroscopy (AES)/scanning Auger microscopy (SAM) and scanning transmission electron microscopy–electron energy loss spectroscopy (STEM-EELS) when selecting a defect analysis technique. The geometry of the analysis volumes for each technique is visualized. The analysis volume for AES/SAM is shaped like a button while the STEM-EELS analysis volume is more like a thread extending throughout the thickness of the prepared sample. The usefulness of this framework is illustrated with the example of small defect particles. In this example the size and shape of the AES/SAM analysis volume is a better fit to the defect, thus it provides better chemical analysis while STEM provides better images of the defects.


2002 ◽  
Vol 17 (11) ◽  
pp. 2929-2934 ◽  
Author(s):  
J. S. Huang ◽  
C. B. Vartuli ◽  
T. Nguyen ◽  
N. Bar-Chaim ◽  
J. Shearer ◽  
...  

Metal contact of compound semiconductors has been extensively studied using various characterization tools. However, there was little work of scanning transmission electron microscopy (STEM) done previously for the study of the InP contact systems. Using STEM and Auger electron spectroscopy analyses, we correlated the resistance with interfacial reactions in the AuGe/Ni/Au/Cr/Au contacts to n-InP. Detailed nanoscale structural and chemical information was uniquely revealed by the STEM compared to other techniques. For the high-resistance samples, little interfacial reaction between n-InP and Au occurred. For the low-resistance samples, significant out-diffusion of P in the Au and Ni layers occurred, forming Au–P and Ni–P metallic compounds. Accumulation of Ge in the Ni layer was also detected. We suggest that Ni–P may be very critical in obtaining low contact resistance for n-InP.


Author(s):  
J. M. Cowley

The comparison of scanning transmission electron microscopy (STEM) with conventional transmission electron microscopy (CTEM) can best be made by means of the Reciprocity Theorem of wave optics. In Fig. 1 the intensity measured at a point A’ in the CTEM image due to emission from a point B’ in the electron source is equated to the intensity at a point of the detector, B, due to emission from a point A In the source In the STEM. On this basis it can be demonstrated that contrast effects In the two types of instrument will be similar. The reciprocity relationship can be carried further to include the Instrument design and experimental procedures required to obtain particular types of information. For any. mode of operation providing particular information with one type of microscope, the analagous type of operation giving the same information can be postulated for the other type of microscope. Then the choice between the two types of instrument depends on the practical convenience for obtaining the required Information.


Author(s):  
F. Khoury ◽  
L. H. Bolz

The lateral growth habits and non-planar conformations of polyethylene crystals grown from dilute solutions (<0.1% wt./vol.) are known to vary depending on the crystallization temperature.1-3 With the notable exception of a study by Keith2, most previous studies have been limited to crystals grown at <95°C. The trend in the change of the lateral growth habit of the crystals with increasing crystallization temperature (other factors remaining equal, i.e. polymer mol. wt. and concentration, solvent) is illustrated in Fig.l. The lateral growth faces in the lozenge shaped type of crystal (Fig.la) which is formed at lower temperatures are {110}. Crystals formed at higher temperatures exhibit 'truncated' profiles (Figs. lb,c) and are bound laterally by (110) and (200} growth faces. In addition, the shape of the latter crystals is all the more truncated (Fig.lc), and hence all the more elongated parallel to the b-axis, the higher the crystallization temperature.


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