Two-Band Tunneling Currents and Stress-Induced Leakage in Ultra-Thin SiO2 Films
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ABSTRACTThe conduction band and valence band electron tunneling currents in ultra-thin SiO2 films at the transition from direct to Fowler-Nordheim tunneling regimes are studied. The slopes of the current voltage characteristics agree well with the simulations performed. The Stress-Induced Leakage Current (SILC) behavior is quite similar for both conduction and valence band currents even if the amplitude of the valence band SILC is much lower. We show that a linear dependence exists between the stress-induced interface trap density and both valence and conduction band SILC. A new model of SILC is also proposed.
Excess Low-Frequency Noise in Ultrathin Oxide n-MOSFETs Arising From Valence-Band Electron Tunneling
2005 ◽
Vol 52
(9)
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pp. 2061-2066
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1987 ◽
Vol 30
(1-4)
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pp. 298-303
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2007 ◽
Vol 54
(2)
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pp. 316-322
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