Multilevel Interconnection Technologies and Future Requirements for Logic Applications
Keyword(s):
Low K
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ABSTRACTThe performance and cost of the logic ICs is more and more dominated by the interconnections. Reducing the capacitances in the advanced processes, especially with low k dielectrics, is a priority, while a differentiated approach can be applied for lowering the connection resistances, e.g. in adapting the interconnect material to specific levels. Integrating new materials leads to difficult trade-offs in order to achieve a good electrical performance of the circuit. Finally the increased number of levels of interconnection addresses other fields like integration density, defectivity reduction or cost.
2007 ◽
Vol 129
(4)
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pp. 460-468
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2001 ◽
Vol 48
(10)
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pp. 2210-2215
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1990 ◽
Vol 37
(10)
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pp. 2141-2147
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2012 ◽
Vol 2012
(1)
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pp. 000967-000974
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2015 ◽
Vol 785
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pp. 325-329
2020 ◽
Vol 1486
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pp. 062007