An Interactive System for Wafer Emissivity Estimation as Determined in an RTP Chamber

1997 ◽  
Vol 470 ◽  
Author(s):  
Maurizio Fulco ◽  
Onofrio L. Russo ◽  
Sergey Belikov ◽  
Walter Kosonocky

ABSTRACTWe demonstrate an interactive software system in which the emissivity of wafers can be estimated in situ using different models. The system allows the data taker to introduce a choice of design parameters necessary for the control of temperature uniformity. The objective of the interactive system is to obtain a better estimation of the wavelength dependent emissivity by using existing data such as integrated emissivity, for example, as input information. Results for some of the models are presented and compared to show differences in the models chosen. The principle advantage offered by the system are the likely prospects of a realistic improvement and confident assessment for real time temperature measurement and control in an RTP environment.

1998 ◽  
Vol 525 ◽  
Author(s):  
Bruce Peuse ◽  
Gary Miner ◽  
Mark Yam ◽  
Curtis Elia

ABSTRACTThis paper reviews work to develop and improve the temperature measurement and control technology of a commercial rapid thermal processing (RTP) system. A description of the main features of this system is given, which includes a concentric multi-zone lamp heating source, multi-point temperature measurement system and real time wafer temperature control. Innovations in RTP optical thermometry are described which resulted in improved low temperature performance, a real time spectral emissivity measurement tool which enables emissivity independent temperature measurement and an improved temperature calibration capability. The multi-input multi-output (MIMO) optimal wafer temperature control methodology is discussed. Process results demonstrating an equivalent process temperature performance of 4°C, 3-sigma, all-points-all-wafers will be presented.


1993 ◽  
Author(s):  
Steven A. Henck ◽  
Walter M. Duncan ◽  
Lee M. Loewenstein ◽  
John Kuehne

2018 ◽  
Vol 9 (24) ◽  
pp. 7165-7172 ◽  
Author(s):  
Sebastian Volk ◽  
Nuri Yazdani ◽  
Olesya Yarema ◽  
Maksym Yarema ◽  
Deniz Bozyigit ◽  
...  

Author(s):  
Peter Rodgers ◽  
Arman Molki

Hands-on laboratory skills play a vital role in providing students with a sound understanding of the scientific fundamentals and their application in solving real-life engineering problems. One of the essential laboratory based courses taught at our Institute is Introduction to Measurements and Instrumentation. The design and implementation of such a course has been well documented in Western engineering education, but presents specific challenges in the Gulf region due to economical, social and cultural factors. This paper discusses the adaptation of corresponding Western courses to undergraduate mechanical engineering studies in the Gulf region. Laboratory exercises for temperature measurement and control are described, which consist of four modules, each building upon the other. In each module, students learn how to design an accurate measuring system, and process and interpret collected data. In the first module, the students are required to build a thermocouple reader using an AD620 instrumentation amplifier and to compare measurements with NIST reference tables. The second module is an introduction to LabVIEW, a graphical data acquisition programming language. The students are required to write a LabVIEW program to record multiple thermocouple signals from a heated plate under varying convective cooling conditions, using a high resolution temperature logger with on-board signal conditioning. The third and fourth modules focus on temperature control techniques. In the third laboratory exercise, the students are required to construct an electrical circuit using a low-power PCB relay and NPN bipolar transistor to develop a bang-bang linear temperature controller. The program created in module two is modified to have the heater operation automatically controlled for a fixed temperature set point. In module four, the students replace the bang-bang controller built in the previous lab with a commercially available PID controller and explore the differences between PID and linear temperature control systems. For each module, students are required to submit a formal report covering the theoretical background, the experimental procedure employed, uncertainty analysis, and conclusions and recommendations. An effective teaching strategy is outlined that covers the fundamental concepts of temperature measurement and control through carefully designed experiments, with sample results presented. Emphasis is placed on the tailoring of the course topics to engineering education in the Gulf region.


2022 ◽  
Vol 43 (3) ◽  
Author(s):  
Jonathan Pearce ◽  
Declan Tucker ◽  
Carmen García Izquierdo ◽  
Raul Caballero ◽  
Trevor Ford ◽  
...  

AbstractMineral insulated, metal sheathed (MI) Type K and Type N thermocouples are widely used in industry for process monitoring and control. One factor that limits their accuracy is the dramatic decrease in the insulation resistance at temperatures above about 600 °C which results in temperature measurement errors due to electrical shunting. In this work the insulation resistance of a cohort of representative MI thermocouples was characterised at temperatures up to 1160 °C, with simultaneous measurements of the error in indicated temperature by in situ comparison with a reference Type R thermocouple. Intriguingly, there appears to be a systematic relationship between the insulation resistance and the error in the indicated temperature. At a given temperature, as the insulation resistance decreases, there is a corresponding increasingly negative error in the temperature measurement. Although the measurements have a relatively large uncertainty (up to about 1 °C in temperature error and up to about 10 % in insulation resistance measurement), the trend is apparent at all temperatures above 600 °C, which suggests that it is real. Furthermore, the correlation disappears at temperatures below about 600 °C, which is consistent with the well-established diminution of insulation resistance breakdown effects below that temperature. This raises the intriguing possibility of using the as-new MI thermocouple calibration as an indicator of insulation resistance breakdown: large deviations of the electromotive force (emf) in the negative direction could indicate a correspondingly low insulation resistance.


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