In situ real‐time ellipsometry for film thickness measurement and control

1992 ◽  
Vol 10 (4) ◽  
pp. 934-938 ◽  
Author(s):  
Steven A. Henck
Keyword(s):  
Film Thickness ◽  
Real Time ◽  
Thickness Measurement ◽  
And Control ◽  
Measurement And Control ◽  
Film Thickness Measurement

In-situ spectral ellipsometry for real-time thickness measurement and control

1993 ◽  
Author(s):  
Steven A. Henck ◽  
Walter M. Duncan ◽  
Lee M. Loewenstein ◽  
John Kuehne
Keyword(s):  
Real Time ◽  
Thickness Measurement ◽  
Spectral Ellipsometry ◽  
And Control ◽  
Measurement And Control

In-situ film thickness measurement for CVD by use of spectrometer

2000 ◽  
Author(s):  
Tomomi Ino ◽  
Akira Soga ◽  
Yoshiaki Akama ◽  
Naoto Nishida
Keyword(s):  
Film Thickness ◽  
Thickness Measurement ◽  
Film Thickness Measurement

In situ thin film thickness measurement with acoustic Lamb waves

1995 ◽  
Vol 66 (17) ◽  
pp. 2177-2179 ◽  
Author(s):  
Jun Pei ◽  
F. Levent Degertekin ◽  
Butrus T. Khuri‐Yakub ◽  
Krishna C. Saraswat
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Lamb Waves ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
Film Thickness Measurement

An ellipsometric data acquisition method for thin film thickness measurement in real time

2008 ◽  
Vol 19 (4) ◽  
pp. 047002 ◽  
Author(s):  
Sang-Heon Ye ◽  
Soo Hyun Kim ◽  
Yoon Keun Kwak ◽  
Hyun Mo Cho ◽  
Yong Jai Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Data Acquisition ◽  
Real Time ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
Film Thickness Measurement ◽  
Acquisition Method
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