In-situ spectral ellipsometry for real-time thickness measurement and control

1993 ◽  
Author(s):  
Steven A. Henck ◽  
Walter M. Duncan ◽  
Lee M. Loewenstein ◽  
John Kuehne
Keyword(s):  
Real Time ◽  
Thickness Measurement ◽  
Spectral Ellipsometry ◽  
And Control ◽  
Measurement And Control

In situ spectral ellipsometry for real‐time thickness measurement: Etching multilayer stacks

1993 ◽  
Vol 11 (4) ◽  
pp. 1179-1185 ◽  
Author(s):  
Steven A. Henck ◽  
Walter M. Duncan ◽  
Lee M. Lowenstein ◽  
Stephanie Watts Butler
Keyword(s):  
Real Time ◽  
Thickness Measurement ◽  
Spectral Ellipsometry ◽  
Multilayer Stacks

An Interactive System for Wafer Emissivity Estimation as Determined in an RTP Chamber

1997 ◽  
Vol 470 ◽  
Author(s):  
Maurizio Fulco ◽  
Onofrio L. Russo ◽  
Sergey Belikov ◽  
Walter Kosonocky
Keyword(s):  
Temperature Measurement ◽  
Real Time ◽  
Design Parameters ◽  
Interactive System ◽  
Interactive Software ◽  
Temperature Uniformity ◽  
And Control ◽  
Measurement And Control ◽  
Existing Data

ABSTRACTWe demonstrate an interactive software system in which the emissivity of wafers can be estimated in situ using different models. The system allows the data taker to introduce a choice of design parameters necessary for the control of temperature uniformity. The objective of the interactive system is to obtain a better estimation of the wavelength dependent emissivity by using existing data such as integrated emissivity, for example, as input information. Results for some of the models are presented and compared to show differences in the models chosen. The principle advantage offered by the system are the likely prospects of a realistic improvement and confident assessment for real time temperature measurement and control in an RTP environment.

scholarly journals In Situ Measurement and Control of the Fermi Level in Colloidal Nanocrystal Thin Films during Their Fabrication

2018 ◽  
Vol 9 (24) ◽  
pp. 7165-7172 ◽  
Author(s):  
Sebastian Volk ◽  
Nuri Yazdani ◽  
Olesya Yarema ◽  
Maksym Yarema ◽  
Deniz Bozyigit ◽  
...  
Keyword(s):  
Thin Films ◽  
Fermi Level ◽  
In Situ Measurement ◽  
And Control ◽  
Measurement And Control
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