Advances in Rtp Temperature Measurement and Control

1998 ◽  
Vol 525 ◽  
Author(s):  
Bruce Peuse ◽  
Gary Miner ◽  
Mark Yam ◽  
Curtis Elia

ABSTRACTThis paper reviews work to develop and improve the temperature measurement and control technology of a commercial rapid thermal processing (RTP) system. A description of the main features of this system is given, which includes a concentric multi-zone lamp heating source, multi-point temperature measurement system and real time wafer temperature control. Innovations in RTP optical thermometry are described which resulted in improved low temperature performance, a real time spectral emissivity measurement tool which enables emissivity independent temperature measurement and an improved temperature calibration capability. The multi-input multi-output (MIMO) optimal wafer temperature control methodology is discussed. Process results demonstrating an equivalent process temperature performance of 4°C, 3-sigma, all-points-all-wafers will be presented.

Author(s):  
Peter Rodgers ◽  
Arman Molki

Hands-on laboratory skills play a vital role in providing students with a sound understanding of the scientific fundamentals and their application in solving real-life engineering problems. One of the essential laboratory based courses taught at our Institute is Introduction to Measurements and Instrumentation. The design and implementation of such a course has been well documented in Western engineering education, but presents specific challenges in the Gulf region due to economical, social and cultural factors. This paper discusses the adaptation of corresponding Western courses to undergraduate mechanical engineering studies in the Gulf region. Laboratory exercises for temperature measurement and control are described, which consist of four modules, each building upon the other. In each module, students learn how to design an accurate measuring system, and process and interpret collected data. In the first module, the students are required to build a thermocouple reader using an AD620 instrumentation amplifier and to compare measurements with NIST reference tables. The second module is an introduction to LabVIEW, a graphical data acquisition programming language. The students are required to write a LabVIEW program to record multiple thermocouple signals from a heated plate under varying convective cooling conditions, using a high resolution temperature logger with on-board signal conditioning. The third and fourth modules focus on temperature control techniques. In the third laboratory exercise, the students are required to construct an electrical circuit using a low-power PCB relay and NPN bipolar transistor to develop a bang-bang linear temperature controller. The program created in module two is modified to have the heater operation automatically controlled for a fixed temperature set point. In module four, the students replace the bang-bang controller built in the previous lab with a commercially available PID controller and explore the differences between PID and linear temperature control systems. For each module, students are required to submit a formal report covering the theoretical background, the experimental procedure employed, uncertainty analysis, and conclusions and recommendations. An effective teaching strategy is outlined that covers the fundamental concepts of temperature measurement and control through carefully designed experiments, with sample results presented. Emphasis is placed on the tailoring of the course topics to engineering education in the Gulf region.


2014 ◽  
Vol 556-562 ◽  
pp. 2492-2495
Author(s):  
Ming Yu Tong ◽  
Di Jian Xu ◽  
Jin Liang Shi

with the rapid development of science and technology, in all fields of temperature control system of the precision, stability and other requirements of increasingly high, the control system is the myriads of changes. Computer measurement and control technology, the traditional electronic measuring changed dramatically in the principle, function, accuracy and automation degree, degree of automation of the scientific experiment and application engineering to improve. Temperature control key lies in the two aspects of temperature measurement and control. Temperature measurement is based on temperature control, this technology is quite mature. But because of the increasingly complex control object, control in the temperature still exist many problems. This thesis presents the design of industrial temperature resistance furnace computer using PID algorithm, Smith predictive control algorithm, darin algorithm, three algorithms are studied based on the control system, and the control algorithm was simulated using the MATLAB simulation software, and the advanced control algorithm is studied [1-3].


2012 ◽  
Vol 188 ◽  
pp. 244-249 ◽  
Author(s):  
Fabrizio Vecchio ◽  
Thomas Maeder ◽  
Conor Slater ◽  
Peter Ryser

An innovative multifunctional LTCC module has been designed for miniature atomic clock packaging. Efficient packaging and interconnection of the atomic clock packaging is a critical issue and a precise temperature control is required for some components, such as mini-cell and light source. The great advantage of using LTCC technology for this application is that it allows the integration of different functions, such as heaters and PTCs resistors for temperature measurement and control, and optionally other active elements. In this research, a platform for measuring the thermal conductivity of materials has been developed in order to perform precise thermal studies on the packaging. The relationship between achieved temperature and power dissipated for the heating of the LTCC module has been calculated in different experimental configurations, in order to determine the effects of conduction and convection on the heating and estimate the thermal losses that they introduce into the system.


1997 ◽  
Vol 470 ◽  
Author(s):  
Maurizio Fulco ◽  
Onofrio L. Russo ◽  
Sergey Belikov ◽  
Walter Kosonocky

ABSTRACTWe demonstrate an interactive software system in which the emissivity of wafers can be estimated in situ using different models. The system allows the data taker to introduce a choice of design parameters necessary for the control of temperature uniformity. The objective of the interactive system is to obtain a better estimation of the wavelength dependent emissivity by using existing data such as integrated emissivity, for example, as input information. Results for some of the models are presented and compared to show differences in the models chosen. The principle advantage offered by the system are the likely prospects of a realistic improvement and confident assessment for real time temperature measurement and control in an RTP environment.


2014 ◽  
Vol 30 (3) ◽  
pp. 749-759 ◽  
Author(s):  
Marina Goldfeld ◽  
Jens Christensen ◽  
David Pollard ◽  
Elizabeth R. Gibson ◽  
Jonathon T. Olesberg ◽  
...  

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