Multilayer Composite Diamond Heat Spreaders for Electronic Packaging
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AbstractHeat spreader characteristics of single layer and multilayer diamond composite substrates are determined by bonding to electronic device wafers. Preparation of diamond substrates, metallization and bonding procedures to device wafers are described. Infrared microscopy imaging of the bonded device wafers is used to determine the heat spreading characteristics. Advantages associated with multilayer diamond composite heat spreaders are discussed.
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2015 ◽
Vol 2015
(CICMT)
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pp. 000062-000066
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1998 ◽
Vol 120
(4)
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pp. 322-327
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Keyword(s):
2001 ◽
Vol 123
(3)
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pp. 173-181
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2013 ◽
Vol 8
(5)
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pp. 437-445
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