Strained-Si Mos Field-Effect Transistors: Building Devices on Relaxed -SI1−xGEx Buffer Layers
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ABSTRACTThe experimental application of strained-Si / relaxed-Si1−xGex heterostructures to n-MOSFETs is discussed, focusing on the enhanced mobility provided by the strain. This paper provides an overview of the theoretically-predicted electronic properties of these heterostructures, as well as their growth. Several practical issues which arise in MOS applications are covered, including the effect of the relaxed-Si1−xGex, buffer layers on diode performance, and the observation of self-heating effects in the output characteristics of the MOS transistors.
2021 ◽
Vol 39
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pp. 013201
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2013 ◽
Vol 52
(4S)
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pp. 04CC03
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2020 ◽
Vol 67
(10)
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pp. 4085-4091
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2021 ◽
Vol 21
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pp. 5736-5741
2006 ◽
Vol 24
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pp. 624-628
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