Epitaxial CeO2 Growth on Si (111) for SOI

1994 ◽  
Vol 341 ◽  
Author(s):  
L. Tye ◽  
T. Chikyow ◽  
N. A. El-Masry ◽  
S. M. Bedair

AbstractEpitaxial growth of CeO2 was obtained on the Si(111) surface by laser ablation in UHV atmosphere. However, a dual amorphous layer formed at the interface, yielding a CeO2/α:-CeOx/α-SiO2/Si(111) structure. This structure is speculated to be caused by a reaction occurring between Ce oxide and Si. Post annealing in O2 ambient caused the regrowth of CeO2, eliminated the α-CeOx layer, and increased the thickness of the SiO2 layer. The new CeO2/SiO2/Si(111) structure shows improved breakdown voltage and fewer interfacial states as observed by C-V and I-V measurements. The SiO2 is expected to tie surface states with Si, whereas the single crystal CeO2 will allow the epitaxial growth of lattice-matched Si on this insulating film. The effect of growth conditions and O2 annealing on both the structural and the electrical properties of this epitaxial oxide will be presented.

1989 ◽  
Vol 158 ◽  
Author(s):  
J. P Zheng ◽  
Q. Y. Ying ◽  
H. S. Kim ◽  
D. Bhattacharya ◽  
D. T. Shaw ◽  
...  

ABSTRACT0.6 µm-wide lines of high Tc Y-Ba-Cu-O have been fabricated by direct laser writing on mirror-like thin films which were grown by laser deposition without post annealing. Laser ablation etching had no effect on the Tc and Jc until the lines were < 1µm wide. The 0.6 µm-wide strip showed some degradation of Tc and Jc. The critical current densities for these patterned lines were measured to be ∼5×106 A/cm2 at 50 K.


2014 ◽  
Vol 130 ◽  
pp. 127-130 ◽  
Author(s):  
Guang Ji ◽  
Aimin Chang ◽  
Hongyi Li ◽  
Yahong Xie ◽  
Huimin Zhang ◽  
...  

1996 ◽  
Vol 423 ◽  
Author(s):  
J. C. Roberts ◽  
F. G. Mcintosh ◽  
M. Aumer ◽  
V. Joshkin ◽  
K. S. Boutros ◽  
...  

AbstractThe emission wavelength of the InxGa1−xN ternary system can span from the near ultraviolet through red regions of the visible spectrum. High quality double heterostructures with these InxGa1−xN active layers are essential in the development of efficient optoelectronic devices such as high performance light emitting diodes and laser diodes. We will report on the MOCVD growth and characterization of thick and thin InGaN films. Thick InxGa1−xN films with values of x up to 0.40 have been deposited and their photoluminescence (PL) spectra measured. AlGaN/InGaN/AlGaN double heterostructures (DHs) have been grown that exhibit PL emission in the violet, blue, green and yellow spectral regions, depending on the growth conditions of the thin InGaN active layer. Preliminary results of an AllnGaN/InGaN/AllnGaN DH, with the potential of realizing a near-lattice matched structure, will also be presented.


1998 ◽  
Vol 66 (1) ◽  
pp. 99-102 ◽  
Author(s):  
C. Xu ◽  
Y. Long ◽  
R. Zhang ◽  
L. Zhao ◽  
S. Qian ◽  
...  

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