Characterization of Ferroelectric Thin Films by ESCA

1990 ◽  
Vol 200 ◽  
Author(s):  
Seshu B. Desu ◽  
Chi K. Kwok
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Electron Spectroscopy ◽  
Surface Composition ◽  
Depth Profiling ◽  
Lead Zirconate ◽  
Ferroelectric Films ◽  
Qualitative And Quantitative ◽  
Profiling Techniques

ABSTRACTElectron spectroscopy for chemical analysis (ESCA) is well suited for investigating the surfaces of ferroelectric films. More importantly, this technique is valuable for ferroelectric films because, reduction of ions, such as Pb2+, Bi3+, and Ti4+ by photon beam is much less likely than probing electron and ion beams which are used in other methods. In the present paper a brief description of the possibilities of ESCA for determining qualitative and quantitative surface composition, and thickness of extremely thin films was presented. Special emphasis was given to multicomponent films, such as lead zirconate titanate (PZT). Factors that lead to considerable difference in the composition of the surface were discussed. Different depth profiling techniques using ESCA were also presented.

Characterization of Sputtered Lead-Zirconate-Titanate Thin Films with Various Compositions

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3600-3603 ◽  
Author(s):  
Tomoyuki Sakoda ◽  
Katsuhiro Aoki ◽  
Yukio Fukuda
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate

Characterization of seeded sol–Gel lead zirconate titanate thin films

1999 ◽  
Vol 19 (6-7) ◽  
pp. 1403-1407 ◽  
Author(s):  
Aiying Wu ◽  
Paula M. Vilarinho ◽  
Isabel M.Miranda Salvado ◽  
João L. Baptista ◽  
C.M. de Jesus ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate

Effect of Thermal Processing Conditions on Ferroelectric PZT Thin Films

1990 ◽  
Vol 200 ◽  
Author(s):  
Chi K. Kwok ◽  
Seshu B. Desu ◽  
Lee Kammerdiner
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Surface Composition ◽  
Rf Sputtering ◽  
Single Crystal Silicon ◽  
Lead Zirconate ◽  
Crystal Silicon ◽  
Pyrochlore Type ◽  
Switching Characteristics ◽  
Anneal Temperature

ABSTRACTFerroelectric and transparent lead–zirconate–titanate thin films were fabricated by rf sputtering. The substrates used were Pt–coated single crystal silicon. The deposition temperatures were relatively low (≅ 200°C). Annealing at high temperatures yielded first pyrochlore type and finally perovskite with good switching characteristics. The phase structure, microstructure, surface composition, and properties were measured as a function annealing time and temperature. In general, the Pb concentration on the surface decreased with increasing annealing temperature or time, whereas Zr concentration increased. It was observed that the grain size of perovskite PZT did not show any significant changes with increasing either anneal temperature or time.

Structure and Characterization of Sputtered Thin Films Based on Lead Titanate.

1991 ◽  
Vol 230 ◽  
Author(s):  
A. Pignolet ◽  
P. E. Schmid ◽  
L. Wang ◽  
F. Lévy
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Titanate ◽  
Rf Magnetron Sputtering ◽  
Lead Zirconate ◽  
Pyroelectric Coefficient ◽  
Amorphous Films ◽  
Substrate Heating ◽  
Ferroelectric Hysteresis

AbstractPure and doped lead-titanate (PT) and lead-zirconate-titanate (PZT) thin films have been deposited on platinum-coated silicon by rf-magnetron sputtering from pressed powder targets. The films have been deposited without substrate heating. The amorphous films were then annealed in an oxygen flow. The structure of the films is tetragonal or rhombohedral depending on composition. The electrical resistivity, dielectric permittivity, ferroelectric hysteresis and pyroelectric coefficient are reported.

Characterization of Switching Properties of Lead-Zirconate-Titanate Thin Films in Ti-Rich Phase

1998 ◽  
Vol 37 (Part 2, No. 5A) ◽  
pp. L522-L524 ◽  
Author(s):  
Katsuhiro Aoki ◽  
Tomoyuki Sakoda ◽  
Yukio Fukuda
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Rich Phase ◽  
Zirconate Titanate

Growth and characterization of lead zirconate titanate (PZT) thin films

2013 ◽  
Vol 21 (11) ◽  
pp. 2893-2899 ◽  
Author(s):  
张翊 ZHANG Yi ◽  
潘峰 PAN Feng ◽  
包达群 BAO Da-qun ◽  
王建艳 WANG Jian-yan ◽  
郭航 GUO Hang
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Pzt Thin Films ◽  
Zirconate Titanate
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