Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow-discharge optical emission spectroscopy

2006 ◽  
Vol 38 (4) ◽  
pp. 757-760 ◽  
Author(s):  
P. Schwaller ◽  
M. Aeberhard ◽  
T. Nelis ◽  
A. Fischer ◽  
R. Thapliyal ◽  
...  
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Lead Zirconate Titanate ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Lead Zirconate ◽  
Pzt Thin Films ◽  
Pulsed Glow Discharge

Depth Profiling of Solution-Deposited Lead Zirconate Titanate Thin Films by Radio Frequency Glow Discharge Atomic Emission Spectroscopy (RF-GDAES)

1999 ◽  
Vol 596 ◽  
Author(s):  
K. S Brinkman ◽  
R. W. Schwartz ◽  
R. K Marcus ◽  
A. Anfone
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Radio Frequency ◽  
Lead Zirconate Titanate ◽  
Emission Spectroscopy ◽  
Depth Profiling ◽  
Atomic Emission ◽  
Lead Zirconate ◽  
Atomic Emission Spectroscopy ◽  
Radio Frequency Glow Discharge

AbstractCompositional depth profiles have been obtained on chemical solution deposited lead zirconate titanate (PZT) thin films using radio-frequency glow discharge atomic emission spectroscopy. The technique is very rapid, requiring less than one minute for complete multi-element depth profiling of films and multilayer substrates. In the present study, the method was employed to obtain compositional profiles of the various metallic (Pb, Zr, Ti, Si) and organic-related (C, H, O) species that are present in the films and underlying device. Preliminary results using this relatively new technique are reported for PZT films deposited by an aqueous acetate process and heat treated at temperatures ranging from 300 and 700°C. The initial results from these investigations suggest that Pb volatilization occurs at temperatures as low as those typically encountered during the pyrolysis step. Significant interdiffusion of the Pb into the underlying Pt electrode at this temperature is also suggested. Effects of modifying ligand on film thickness and organic decomposition behavior were also observed.

Determination of the Interface Roughness between Ni-Coated Layer and Cu Substrate by Glow Discharge Optical Emission Spectroscopy Depth Profiling

2015 ◽  
Vol 1094 ◽  
pp. 181-187
Author(s):  
Yi Liu ◽  
Wei Xuan Lin ◽  
Wei Bing Ye ◽  
Huan Sheng Li ◽  
Jiong Li ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Mesh Size ◽  
Optical Emission ◽  
Interface Roughness ◽  
Depth Profiles ◽  
Information Depth ◽  
Cu Substrates

The depth profiles of Ni-coated copper substrates polished by different mesh size sandpapers were measured by the glow discharge optical emission spectroscopy (GDOES) depth profiling technique. The measured depth profiles were well fitted by the MRI-CRAS model developed recently on the basis of the Mixing-Roughness-Information depth (MRI) model and the CRAter-Simulation (CRAS) model, taking into account the pronounced crater effect upon GDOES depth profiling. The crater effect upon depth profiling was characterized quantitatively and the interface roughness values between the coated Ni layer and the Cu substrates were determined and compared with the ones measured by AFM.

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

2002 ◽  
Vol 373 (7) ◽  
pp. 656-663 ◽  
Author(s):  
Kenneth R. Marcus ◽  
Alwyn B. Anfone ◽  
Wandee Luesaiwong ◽  
Teresa A. Hill ◽  
Dvora Perahia ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

scholarly journals Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

2016 ◽  
Vol 31 (11) ◽  
pp. 2207-2212 ◽  
Author(s):  
C. Schubert ◽  
V. Hoffmann ◽  
A. Kümmel ◽  
J. Sinn ◽  
M. Härtel ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Diamond Like Carbon ◽  
Compositional Depth Profiling

This article describes the compositional depth profiling (CDP) of diamond-like carbon (DLC) layers by Glow Discharge-Optical Emission Spectrometry (GD-OES).

Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films

2011 ◽  
Vol 520 (5) ◽  
pp. 1660-1667 ◽  
Author(s):  
Marcus Wilke ◽  
Gerd Teichert ◽  
Ryota Gemma ◽  
Astrid Pundt ◽  
Reiner Kirchheim ◽  
...  
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission
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